Ti target material and Al backboard welding method
A welding method and technology of the back plate, applied in the direction of welding equipment, metal processing equipment, manufacturing tools, etc., can solve the problems that heavy pressure cannot be applied, diffusion welding method cannot be used, and it is easy to break apart, so as to achieve the effect of improving the bonding ability
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[0033] Example 1
[0034] refer to figure 1 , figure 1 It is a schematic flowchart of a method for welding a titanium target aluminum back plate provided by an embodiment of the present invention. Specifically, the method includes:
[0035] Step S1: providing a target material and a backing plate, the target material is a Ti target material, and the backing plate is an Al backing plate.
[0036] In the embodiment of the present invention, the target material is a Ti target material, and the back plate is an Al back plate. The shape of the target can be determined according to specific needs, for example, the surface of the target can be set to be in the shape of a triangle, a rectangle or a circle.
[0037] Step S2: forming a nickel layer on the welding surface of the Ti target.
[0038] Since the thermal expansion coefficients of Ti and Al are quite different (the thermal expansion coefficient of Ti is 10.8, and the thermal expansion coefficient of Al is 23.2), when the ...
Example Embodiment
[0042] Embodiment 2
[0043] The following describes the welding method of the titanium target aluminum back plate provided by the present invention in detail with a specific embodiment. refer to figure 2 , figure 2 It is a schematic flowchart of another titanium target aluminum back plate welding method provided by the embodiment of the present invention, and the method is specifically as follows:
[0044] Step S1: providing a target material and a backing plate, the target material is a Ti target material, and the backing plate is an Al backing plate.
[0045] refer to image 3 , the surface of the Ti target material in this embodiment is in the shape of a triangle, the bottom b of the triangle is 352.044mm, the height a is 387.35mm, the thickness of the Ti target material is 10mm, and the thickness of the 10mm is increased by 2mm allowance, The purpose of increasing the allowance is to prevent the Ti target from shrinking severely during the cooling process and affect...
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