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Semiconductor manufacturing method and system

A manufacturing method, semiconductor technology, applied in the direction of semiconductor/solid-state device manufacturing, general control system, control/regulation system, etc., can solve the problems of more time-consuming, increased manufacturing cost, increased manufacturing cost, etc., to improve advanced process control , The effect of reducing time and manufacturing costs

Active Publication Date: 2016-07-06
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the first trial production (pilotrun) fails, the second trial production will increase the manufacturing cost
In other cases, it is necessary to rely on the process engineer to substitute more information or spend more time to adjust to a better initial value of the APC module, which also causes time loss and increases in manufacturing costs

Method used

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  • Semiconductor manufacturing method and system
  • Semiconductor manufacturing method and system
  • Semiconductor manufacturing method and system

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Embodiment Construction

[0024] The following describes the preferred embodiment of the present invention. Each embodiment is used to illustrate the principles of the present invention, but not to limit the present invention. The protection scope of the present invention should be determined by the appended claims.

[0025] refer to figure 1 , which is a schematic diagram of an embodiment of the semiconductor processing system 100 . The semiconductor processing system 100 and the semiconductor processing method implemented in the system 100 will be described in detail below. The semiconductor processing system 100 includes an exemplary processing tool 102 for performing semiconductor fabrication processes on one or more semiconductor wafers 104 . The semiconductor manufacturing process performed by the processing tool 102 includes: deposition, thermal oxidation, implantation, lithography exposure, or ion implantation. In one embodiment, the processing tool 102 is an etching tool for etching polysi...

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Abstract

The present invention provides a semiconductor manufacturing method and system. The method includes: providing product data of a product, the product data including a sensitive product parameter; searching for an existing product based on the sensitive product parameter to identify a related product from the existing product; using the Corresponding data for associated products clears an initial value of a process model parameter; assigns the initial value of the process model parameter to a process model associated with a manufacturing procedure; adjusts a process recipe using the process model; and uses the process recipe The manufacturing process is performed on a semiconductor wafer. The invention can continuously improve the advanced process control of semiconductors and reduce time and manufacturing costs.

Description

technical field [0001] The present invention relates to a semiconductor manufacturing method and system, in particular to a semiconductor manufacturing method and system capable of performing advanced process control on new tapout products. Background technique [0002] Advanced process control (advanced process control, APC) is a technology used to improve the manufacturing quality and efficiency of semiconductor integrated circuits (integrated circuits, ICs), especially for small-sized high-density semiconductor ICs. In semiconductor technology, when advanced process control is used, the initial values ​​of the parameters in the APC module can be used to start the APC program. In the existing method, the initial value of the parameters of the APC module is manually provided by the engineer. The initial value is manually assigned by a process engineer based on experience or a best guess estimate. However, existing methods are limited by several issues. One of them is tha...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B13/04H01L21/00
CPCG05B19/41865H01L21/67253H01L21/67276Y02P90/02
Inventor 许志维郑育真刘文斌王舜屏卢欣荣王若飞牟忠一曾衍迪林俊贤
Owner TAIWAN SEMICON MFG CO LTD