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Method for writing to resistance-change non-volatile memory elements, and resistance-change non-volatile memory device

A non-volatile storage, resistance-variable technology, applied in electrical components, information storage, static memory, etc., to achieve the effects of high-speed readout, stabilization, and improved yield

Active Publication Date: 2013-10-09
PANASONIC SEMICON SOLUTIONS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0034] Thus, the characteristics of the memory cell in the half-LR state become a new problem

Method used

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  • Method for writing to resistance-change non-volatile memory elements, and resistance-change non-volatile memory device
  • Method for writing to resistance-change non-volatile memory elements, and resistance-change non-volatile memory device
  • Method for writing to resistance-change non-volatile memory elements, and resistance-change non-volatile memory device

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Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0154] First, the writing method of the variable resistance element and the nonvolatile memory device in the first embodiment of the present invention will be described.

[0155] image 3 It is a graph showing an example of the current-voltage characteristics of the pulse voltage (Vp) and the cell current (Ir) accompanying the change in the resistance of the memory cell 105. figure 2 A voltage (=2.4V) is applied to the terminal G of the transistor 104 to turn on the transistor 104, figure 2 A resistance change pulse (0V→Vp→0V, pulse width 50ns) with the wiring S as a reference potential is applied between the wiring U-S, and the horizontal axis shows the value that causes the pulse voltage Vp to swing from a negative voltage to a positive voltage. In addition, the vertical axis shows the read current value. The read current value is the voltage applied to both ends of the resistance variable element 10a after applying a voltage based on the resistance change pulse, or the absolut...

Embodiment approach 2

[0354] Next, a method of writing a variable resistance element and a nonvolatile memory device in Embodiment 2 of the present invention will be described.

[0355] Such as Image 6 As in (c), even after the low-resistance stabilization writing is performed in the early stage immediately after the manufacture, the low-resistance state rarely changes to half LR. In this case, a wrong reading judgment may be made. One of the countermeasures is the use of error correction methods such as ECC, and the other is general non-volatile memory, verifying during writing, and performing additional writing (low Resistance stabilization writing) method. Here, a method of performing the latter check and additional writing (low resistance stabilization writing) will be described.

[0356] After the low-resistance writing is performed, the low-resistance state is determined, and the half-LR state, that is Image 6 (c) In the case of such an abnormal state, it is necessary to perform low-resistance...

Embodiment approach 3

[0386] Next, a method for writing a variable resistance element and a nonvolatile memory device in Embodiment 3 of the present invention that perform low-resistance stabilization writing using positive voltage pulses without using verification will be described.

[0387] Figure 7 (b), Figure 7 The data shown in (c) implies that even if the low-resistance stabilization writing immediately after manufacturing is performed, the subsequent low-resistance writing frequently becomes the half-LR state of characteristic type 2 The correction method described in the first embodiment described above cannot be eliminated, and even the correction method described in the second embodiment may cause a correction step almost every time.

[0388] The inventors of us have studied a method of correcting the half LR state of a memory cell having such frequent characteristic type 2 write characteristics to a low resistance state.

[0389] When paying attention Figure 7 The pulse V-I characteristic di...

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Abstract

A method of writing data to a variable resistance element (10a) that reversibly changes between a high resistance state and a low resistance state according to a polarity of an applied voltage, as a voltage applied to an upper electrode (11) with respect to a lower electrode (14t): a positive voltage is applied in a high resistance writing step (405) to set the variable resistance element to a high resistance state (401); a negative voltage is applied in a low resistance writing step (406, 408) to set the variable resistance element to a low resistance state (403, 402); and a positive voltage is applied in a low resistance stabilization writing step (404) after the negative voltage is applied in the low resistance writing step, thereby setting the variable resistance element through the low resistance state to the high resistance state.

Description

Technical field [0001] The present invention relates to a method for writing data to a resistance variable nonvolatile memory element whose resistance value changes in response to an applied electric signal, and a resistance change type nonvolatile memory element provided with a variable resistance nonvolatile memory element as the resistance change of a memory cell Type non-volatile storage device. Background technique [0002] In recent years, a resistance variable nonvolatile memory device (hereinafter, also abbreviated as "non-volatile memory element") has a memory cell constructed using a variable resistance nonvolatile memory element (hereinafter also referred to as "variable resistance element"). The research and development of deprived storage devices”) is constantly developing. The variable resistance element refers to an element that has at least two threshold voltages (threshold voltages at the time of writing and erasing), and the resistance value exceeds the above-m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G11C13/00H01L27/10H01L45/00H01L49/00
CPCG11C13/0069G11C2213/32G11C2013/0083G11C2213/79G11C2013/0054G11C13/004G11C13/0007G11C2013/009G11C2213/15G11C2013/0092G11C2213/56G11C2013/0073G11C13/0064
Inventor 东亮太郎岛川一彦村冈俊作河合贤
Owner PANASONIC SEMICON SOLUTIONS CO LTD