Coating machine
A technology of coating machine and vapor deposition material, applied in the field of coating machine, can solve problems such as unfavorable product production efficiency, lengthening production process, etc., and achieve the effect of preventing sputtering and speeding up production process
Inactive Publication Date: 2014-04-23
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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Problems solved by technology
However, this coating method requires the use of two devices, and each coating needs to be operated between the two devices, which will result in lengthening the production process and is not conducive to improving the production efficiency of the product
Method used
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Embodiment Construction
[0046] see figure 1 , is the coating machine 100 provided by the present invention, and the coating machine 100 includes a heating system 10 , a carrying system 20 , an ion source 30 and a vacuum coating chamber 40 .
[0047] The vacuum coating chamber 40 includes a bottom 401 and a top 402 . The ion source 30 is fixed on the bottom 401 of the vacuum coating chamber 40, and the ion source 30 is used to provide kinetic energy for the evaporated evaporation material, so that the evaporation material is adsorbed more tightly. The carrying system 20 includes a rotating shaft 21 , a substrate carrying frame 22 and a substrate 23 . The rotating shaft 21 is installed on the top 402 of the vacuum coating chamber 40 facing the ion source 30 , and the substrate carrier 22 is fixedly connected to the rotating shaft 21 . In this embodiment, screws are used to connect the substrate carrier 22 to the rotating shaft 21 . A plurality of substrates 23 are installed on the substrate carrier ...
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The invention provides a coating machine. The coating machine comprises crucibles, electron guns, crucible rotating devices and a bearing plate, wherein the crucibles and the electron guns are arranged on the bearing plate; the crucibles are used for loading evaporation materials for coating optical elements; the electron guns are used for heating the evaporation materials in the crucibles; and the crucible rotating devices are used for driving the crucibles to rotate. The coating machine also comprises cover plates and cover plate deviation devices, wherein the cover plates cover the crucibles and have altitude different with the crucibles to reserve gaps for the rays of the electron guns to enter; and the cover plate deviation devices drive the cover plates to cover or expose the crucibles. The coating machine provided by the invention has the following beneficial effects: when the electron guns are used for premelting the evaporation materials, the cover plate deviation devices are utilized to drive the cover plates to cover the crucibles to prevent the evaporation materials from sputtering; when the electron guns are used for evaporating the evaporation materials, the cover plate deviation devices are utilized to drive the cover plates to expose the crucibles to carry out evaporation coating, thus premelting and coating can be realized in the same equipment to speed up the production flow of the products.
Description
technical field [0001] The invention relates to a film coating machine for film coating. Background technique [0002] The existing vacuum ion coating machine mainly uses an electron gun to heat the evaporation material in the crucible, and evaporates the evaporation material to the surface of the optical element to form an optical film. However, the existing vapor deposition materials are generally in the form of particles. Due to the small size and light weight of the particles, some particles will be splashed out during the heating process, and the particles that are not completely melted will cause stains on the surface of the optical element, affecting The quality of the optics. In order to reduce this phenomenon, it is generally necessary to use an electron gun in a vacuum pre-melting machine to melt the granular evaporation materials into one, and then put them into a vacuum ion coating machine for coating. However, this coating method requires the use of two device...
Claims
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IPC IPC(8): C23C14/30
Inventor 蔡泰生林后尧
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD