Processing system and method of operating a processing system
A processing system and processing chamber technology, applied in the field of processing substrates, can solve problems such as yield and efficiency limitations, complex modules, etc., to achieve the effect of increasing efficiency
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[0083] figure 1 A first embodiment of a coating system 1 according to the invention is shown. The system 1 includes a substrate feed and receiving station (e.g., a swing table) 2 comprising a substrate operable at atmospheric pressure to feed substrates to and / or receive substrates processed in the coating system 1 from the chamber arrangement. swing module.
[0084] The first embodiment of the invention corresponds to a chamber arrangement including a lock chamber 3 and a first coating chamber 4 . The lock chamber 3 is configured as a combined lock-in / lock-out chamber. The first coating chamber 4 has a coating tool 4a for depositing layers on the substrate.
[0085] The chamber arrangement constituted by the lock chamber 3 and the first coating chamber 4 has a first substantially rectilinear transport path T1 indicated by a dotted line and a second substantially rectilinear transport path T2 indicated by a dotted line. The first transmission path T1 and the second transmi...
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