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Capacitive detection type electro-mechanical transducer

An electromechanical transducer, capacitance detection technology, applied in capacitance measurement, measurement of electrical variables, measurement of resistance/reactance/impedance, etc., can solve the problem of narrowing detection bandwidth and achieve the effect of wide detection bandwidth

Inactive Publication Date: 2013-01-02
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, a larger load will be applied to each detection circuit, resulting in a problem that the detection bandwidth is required to be narrowed in order for the detection circuit to operate stably

Method used

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  • Capacitive detection type electro-mechanical transducer

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0023] will refer to figure 1 A CMUT forming a capacitance detection type electromechanical transducer according to the first embodiment will be described.

[0024] In the CMUT according to the present embodiment, one pixel refers to an area in which ultrasonic wave information received by the vibrating membrane 101 is output as a piece of averaged information.

[0025] In one pixel, amplitude and phase information for ultrasonic waves are averaged, and a related apparatus forms an image of the subject based on the pixel-based amplitude and phase information.

[0026] The vibrating film 101 is supported by the supporting portion 103 formed on the substrate 106 . Each of the vibrating film 101 , the support portion 103 and the substrate 106 contains an insulating material.

[0027] The CMUT according to the present embodiment includes a detection electrode (first electrode) 105 arranged on a substrate 106 and a bias electrode (second electrode) 102, the bias electrode The (s...

no. 2 example

[0047] will refer to figure 2 A CMUT forming a capacitance detection type electromechanical transducer according to the second embodiment will be described.

[0048] figure 2 is a diagram of the configuration of a trans-impedance circuit

[0049] figure 2 The configuration in includes operational amplifier 201 , resistors 202 and 204 , and capacitors 203 and 205 . will refer to figure 1 to describe the figure 1 The parts in the corresponding parts.

[0050] The present embodiment is the same as the first embodiment except for the configuration of each detection circuit and the division count associated therewith. Here, the detection circuit 107 is a circuit for detecting a weak current generated by the vibration of the vibrating film.

[0051] In this embodiment, a transimpedance circuit is used, which is a current-voltage conversion circuit that converts a change in weak current into a voltage.

[0052] exist figure 2 , the operational amplifier 201 is connected to...

no. 3 example

[0076] will refer to image 3 A CMUT forming a capacitance detection type electromechanical transducer according to the third embodiment will be described.

[0077] The present embodiment is the same as the first and second embodiments except for the configurations of the detection circuit and the addition circuit.

[0078] image 3 The illustrated configuration includes a current amplifying circuit 301 , a current adding circuit 302 and a current-voltage converting circuit 303 . The detection circuit 107 is formed by the current amplifying circuit 301 .

[0079] Further, the addition circuit 108 is formed by the current addition circuit 302 and the current-voltage conversion circuit 303 .

[0080] Each current amplification circuit 301 amplifies the weak current from the corresponding detection circuit 107 , performs impedance conversion, and outputs the resulting current to the addition circuit 108 .

[0081] In addition circuit 108 , a plurality of input currents are ad...

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Abstract

A capacitive detection type electro-mechanical transducer comprises; a cell formed by a first electrode arranged on a substrate and a second electrode arranged on a vibration film, and a detection circuit for detecting a displacement of the vibration film, based on a capacity change between the first and second electrodes, wherein a plurality of the cells are classified into a plurality of groups, each one includes at least two cells, and the first electrodes or the second electrodes of the cells of the same one group are commonly connected to the same one detection circuit, and an addition circuit for adding, into single information, signals from the plurality of detection circuits corresponding to the plurality of groups, and for outputting the information, and a capacitive load for each one of the detectors are formulated to be dispersedly arranged.

Description

technical field [0001] The present invention relates to capacitance detection type electromechanical transducers, and, in particular, to capacitance detection type electromechanical transducers that can be used, for example, in capacitance detection type ultrasonic sensors. Background technique [0002] There are known diagnostic devices for breast tumors that apply the photoacoustic effect. [0003] For example, in order to detect ultrasonic waves from a subject, a PVDF sensor (about 75 mm in total) including a total of 590 pixels arranged at a pitch of about 3 mm is used. 2 ), each pixel has a width of 2mm. [0004] Like the PVDF sensor, a capacitive detection type ultrasonic sensor (CMUT: Capacitive Micromachined Ultrasonic Transducer) utilizing MEMS technology has been proposed as a sensor with a wider bandwidth compared to the PZT sensor (A.S.Ergun, Y.Huang, X. .Zhuang, O.Oralkan, G.G.Yaralioglu, and B.T.Khuri-Yakub, "Capacitive micromachined ultrasonic transducers: f...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D5/241
CPCG01N29/2406B81C1/00246G01N29/2412B06B1/0292G01D5/24G01R27/26G01R27/2605
Inventor 香取笃史高木诚真岛正男
Owner CANON KK
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