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Three-section combined type ultraprecise positioning table and positioning method thereof

A positioning method and ultra-precise technology, which can be applied to parts and instruments of instruments, etc., can solve the problems of low positioning accuracy and small working stroke, and achieve the effect of shortening positioning time.

Inactive Publication Date: 2011-07-27
NANJING NORMAL UNIVERSITY
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  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

Although laser grating positioning has high positioning accuracy, its working stroke is relatively small, only one grating constant
The image positioning based on computer vision, although the working stroke is relatively large, its positioning accuracy is low

Method used

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  • Three-section combined type ultraprecise positioning table and positioning method thereof
  • Three-section combined type ultraprecise positioning table and positioning method thereof
  • Three-section combined type ultraprecise positioning table and positioning method thereof

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Embodiment Construction

[0019] In order to better understand the technical solution of the present invention, a further detailed description is given below in conjunction with the accompanying drawings.

[0020] The combined ultra-precision positioning table of the present invention is as figure 1 As shown, it includes laser grating detection system, computer vision detection system, photoelectric detection circuit, coarse positioning mechanism, micro-positioning mechanism, drive system and microcomputer control system, etc., in order to realize the three-stage combination of coarse positioning, fine positioning and ultra-precision positioning Combined positioning.

[0021] The rough positioning mechanism completes the steps of rough positioning, which can realize lateral movement, longitudinal movement and plane rotation movement, that is, movement in three directions of X, Y and θ, among which the linear movement is controlled by a pulse subdivision driving high-precision stepping motor, And thro...

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Abstract

The invention relates to the technical field of precision machining, and provides an ultraprecise positioning table and a three-section combined type positioning method which combines coarse positioning, precise positioning and ultraprecise positioning, wherein a computer vision positioning method is adopted for coarse positioning; the positioning table largely drives a coarse positioning mechanism to move in a larger working stroke scope to quickly complete coarse positioning; a coarse grating positioning method is adopted for precise positioning; then a computer judges position deviation according to the size and polarity of mole signals generated by coarse grating and drives the coarse positioning mechanism to move at a quicker speed to complete precise positioning; a fine grating positioning method is adopted for ultraprecise positioning; a piezoceramics micrometric displacement driver is adopted so as to guarantee higher positioning precision. As the three-section combined type positioning method is adopted and positioning combined with large-step quick drive and precise drive is used, the ultraprecise positioning table can realize high-precision positioning in a larger working stroke; meanwhile, the positioning time can be greatly shortened; therefore, high speed positioning is realized.

Description

technical field [0001] The invention relates to a combined ultra-precise positioning platform and a positioning method based on the combination of computer vision technology and grating detection technology, belonging to the technical field of precision machining. Background technique [0002] Ultra-precise positioning technology is one of the current research focuses in the international scientific and technological circles. It has a wide range of applications in the fields of micro-mechanical manufacturing, ultra-precision processing, high-definition display devices, microelectronics manufacturing, operation and assembly of micro-mechanical parts, and bioengineering. Its technology involves many disciplines such as laser theory, precision measurement, precision machinery, computer technology, servo drive, and intelligent control. [0003] With the improvement of industrial production automation, the development and application of precision positioning technology is putting...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00
Inventor 张金龙徐慧刘京南杨安康
Owner NANJING NORMAL UNIVERSITY
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