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A graphite crucible for silicon electromagnetic induction heating and apparatus for silicon melting and refining using the graphite crucible

一种石墨坩埚、电磁感应的技术，应用在自区域熔融法、自熔融液提拉法、单晶生长等方向，能够解决难制作等问题，达到消除熔液和石墨接触、高效硅电磁感应熔融的效果

Inactive Publication Date: 2011-09-07
KOREA INST OF ENERGY RES
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0017] However, the above-mentioned crucible structure is a combination of a cold crucible and a hot crucible, which is more difficult to manufacture than an integrated crucible such as a graphite crucible.
and, if figure 2 As shown, the hot crucible made of graphite in the upper part only serves as an auxiliary heat source, and the silicon casting is mainly carried out in the cold crucible, so there is a problem that heat loss caused by water cooling cannot be avoided

Method used

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  • A graphite crucible for silicon electromagnetic induction heating and apparatus for silicon melting and refining using the graphite crucible
  • A graphite crucible for silicon electromagnetic induction heating and apparatus for silicon melting and refining using the graphite crucible
  • A graphite crucible for silicon electromagnetic induction heating and apparatus for silicon melting and refining using the graphite crucible

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Embodiment 1， Embodiment 2

[0050] In a graphite crucible with a height of 90 mm, an inner diameter of 60 mm, and an outer diameter of 80 mm, 12 (Example 1) and 24 (Example 2) slits with a slit width of 1 mm were formed in a symmetrical structure, and the above-mentioned slits were formed to the bottom plate . At this time, high-density graphite having a density of 1.75 or higher was used as the graphite to be used. On the outside of the above-mentioned crucible, 8 turns of water-cooled induction coils with a diameter of 8 mm are wound to make it have an inner diameter of 100 mm and an outer diameter of 1200 mm. At this time, the interval between the water-cooled coils is 1-2 mm. An alternating current with a frequency of 6 to 10 kHz at a maximum of 30 kW is input to this coil.

[0051] Fill the crucible with silicon chunks (chunk) with a purity of 99.5% and a size of 1 to 10 mm, and form 10 -3 ~10 -5 After the base pressure (base pressure) of Torr, fill Ar and under the working pressure (working pres...

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Abstract

Disclosed herein are a graphite crucible for electromagnetic induction- based silicon melting and an apparatus for silicon melting / refining using the same, which performs a melting operation by a combination of indirect melting and direct melting. The crucible is formed of a graphite material and includes a cylindrical body having an open upper part through which a silicon raw material is charged into the crucible, and an outer wall surrounded by an induction coil, wherein a plurality of slits are vertically formed through the outer wall and an inner wall of the crucible such that an electromagnetic force created by an electric current flowing in the induction coil acts toward an inner center of the crucible to prevent a silicon melt from contacting the inner wall of the crucible.

Description

technical field [0001] The present invention relates to a silicon melting crucible (Crucible), and more specifically, to a silicon electromagnetic induction melting method capable of efficiently melting semiconductors such as silicon by combining an indirect melting method based on crucible heat and a direct melting method based on electromagnetic induction A graphite crucible and a silicon melting and refining device using the crucible are used. Background technique [0002] Since the direct melting method based on electromagnetic induction can melt substances such as metals in a short time, it has high productivity and minimizes the contamination of raw materials. The direct melting method by electromagnetic induction is generally performed according to the following principle. [0003] When an alternating current is input into the induction coil surrounding the crucible to cause a change in the magnetic field (Magnetic Field), an induced current needs to be formed on the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B13/14
CPCC30B13/14Y10T117/10Y10T117/1024Y10T117/1032Y10T117/1068C30B13/24C30B15/10C30B15/16
Inventor 张普允安永洙金儁秀金东国刘权钟
Owner KOREA INST OF ENERGY RES
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