Method using emission spectrum for diagnosing space distribution character of low-pressure plasma torch

Abstract

The invention discloses a method using an emission spectrum for diagnosing the space distribution character of a low-pressure plasma torch. The method adopts a computer to control a precise two-dimensional electric platform to control the measuring point to move; for the diagnosis on the space distribution character of the plasma torch, especially the low-pressure plasma torch, the space two-dimensional distribution of the luminous intensity, electron temperature, electron density, molecular rotation temperature and the molecular vibration temperature of the plasma torch can be obtained through analyzing the full spectrum obtained, and the space two-dimensional distribution has high sensitivity and spatial resolution.

Description

technical field [0001] The invention relates to a high-sensitivity emission spectrum measurement technology with high spatial resolution capability, which is used for diagnosing plasma torches, especially low-pressure plasma torches, and can obtain the luminous intensity, electron temperature, electron density, and molecular weight of the plasma torch. Spatial distribution information such as rotation temperature and molecular vibration temperature. Background technique [0002] As a common method in industry, plasma torch technology has been widely used in the fields of spraying, cutting, chemical vapor deposition, hazardous waste treatment, plasma and tokamak wall material interaction, etc. [0003] The basic principle of the plasma torch is to form an arc discharge between the two electrodes, a gas flow is passed between the two electrodes, the gas is ionized, heated, and expanded, and the formed plasma is ejected from the nozzle to form a plasma jet, that is, the plasma...

AI Technical Summary

Problems solved by technology

However, due to the limitation of the vacuum environment and the vacuum chamber, the method that is feasible in the atmospheric pressure environment is difficult to operate in the low pressure environment. If the experiment is stopped every time, the vacuum chamber is opened, the detection position is adjusted and the vacuum is re-tested, it will not only waste time. , will also affect the experimental conditions and measurement accuracy

Moreover, the spatial resolution of the lattice fiber for spatial resolution is low.

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