Optical component, lighting device, method, and interferometer using device

Abstract

The invention provides an optical component, which is used for generating annular light beams, and comprises an annular peripheral surface, a flat surface and a conical surface, wherein the flat surface as a first end face and the conical surface as a second end face are arranged at the two ends of the annular peripheral surface; and the first end face and the second end face are arranged opposite to each other. The optical component can be used for generating annular light beams; when the annular light beams are applied to an interferometer, the coherent noises of the interferometer system can be restrained, and the energy utilization ratio of a light source of the interferometer can be increased, and meanwhile, the center of the annular light beam is arranged at the center of an optical axis of the interferometer system, thereby reducing the system error of the interferometer system, and improving the measurement accuracy of the interferometer system. The invention also provides a lighting device and a method applying the optical component and an interferometer applying the device.

Description

technical field [0001] The invention relates to the technical field of optical measurement, in particular to an optical element used in an interferometer to generate a ring beam; the invention also relates to an illumination device and method using the optical element and an interferometer using the device. Background technique [0002] In current commercial interferometers, lasers are mostly used as the standard light source of the interferometer. Due to the strong temporal coherence and spatial coherence of laser light, the defects of optical components in the interference system, such as dust, depressions, scars, bubbles, etc., will act as scattering centers, resulting in coherent noise, resulting in the formation of Newton rings or Bullseye, which seriously affects the measurement accuracy of the interferometer system. [0003] In order to solve the problem of coherent noise generated by laser light sources in commercial interferometers, some technical solutions using o...

AI Technical Summary

Problems solved by technology

However, the current ring light source generated by computational holography will be as follows figure 2 The zeroth and plus and minus first order diffractions shown

Therefore, a spatial filter must be used to filter out the zero-order and negative-order diffraction, and only allow the positive-order diffraction (ring beam) to pass, which not only reduces the energy utilization rate of the light source, but also deviates the center of the ring beam emitted by the ring light source. The center of the optical axis of the interferometer system, which will cause the interferometer system to introduce serious system errors

Images