A mipm type internal field emission cathode
A field emission cathode and bottom electrode technology, applied in the field of vacuum electronics and materials science, can solve the problems of low emission efficiency and low emission current density
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Embodiment 1
[0013] refer to figure 1 , the material of the bottom electrode 1 is gold with a thickness of 500 nm; the material of the insulating layer 2 is SiO 2 , with a thickness of 100 nm; the material of the electron storage and transport layer 3 is porous silicon with a thickness of 40 μm, its average conductivity is 0.01 Ω, the average porosity is 50%, and the average pore diameter is 30 nm; the material of the top electrode 4 is gold , with a thickness of 15 nm. at 10 -5 Under torr pressure, the measured emission efficiency is 1.5%, and the beam decays by 1% after 20 hours of continuous operation.
Embodiment 2
[0015] refer to figure 1 , the material 1 of the bottom electrode is chromium with a thickness of 200 nm; the material of the insulating layer 2 is HfO 2 , with a thickness of 300 nm; the material of the electron storage and transport layer 3 is porous silicon, with a thickness of 40 μm, an average conductivity of 0.01 Ω, an average porosity of 50%, and an average pore diameter of 50 nm; the material of the top electrode 4 is Ag , with a thickness of 10 nm. at 10 -5 Under torr pressure, the measured emission efficiency is 1.5%, and the beam decays by 1% after 20 hours of continuous operation.
Embodiment 3
[0017] refer to figure 1 , the material of the bottom electrode 1 is Ag, and the thickness is 200 nm; the material of the insulating layer 2 is Ta 2 o 5 , with a thickness of 400 nm; the material of the electron storage and transport layer 3 is porous silicon, with a thickness of 30 μm, an average conductivity of 0.01 Ω, an average porosity of 50%, and an average pore diameter of 30 nm; the material of the top electrode 4 is ZrN , with a thickness of 8 nm. at 10 -5 Under torr pressure, the measured emission efficiency is 1.3%, and the beam decays by 1% after 20 hours of continuous operation.
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Application Information
- IPC
- H01J1/312
- Inventors
- 邹宇; 展长勇