Transistor assembly and manufacturing method thereof

Abstract

A transistor component and its manufacturing method, the component includes: a semiconductor substrate, a drain, a source, a gate metal seed layer formed on the semiconductor substrate, which has a gel-like substance layer And a plurality of metal seeds and a Schottky contact metal gate are formed on the gate metal seed layer. The method includes: step A: providing a semiconductor substrate; step B: forming a drain and a source on the semiconductor substrate; step C: defining a region of a gate metal seed layer on the semiconductor substrate; Step D: performing a sensitization and activation process to form the gate metal seed layer on the semiconductor substrate; and Step E: performing an electroless plating process to form a Schottky contact metal gate on the gate metal crystal above the seed layer.

Description

technical field [0001] The present invention relates to a transistor component and its manufacturing method, in particular to a transistor component and its manufacturing method which use sensitization, activation and electroless plating to process the gate process technology. Background technique [0002] In recent years, the application of gallium nitride (GaN) in field effect transistor components among the III-V compound semiconductor materials has been booming. The main reason is that compared with gallium arsenide (GaAs), gallium nitride (GaN) GaN has the following advantages: wider bandgap, higher breakdown voltage, stronger bonding force and better thermal stability, so gallium nitride is very suitable for power supplies, Amplifiers and high-temperature components and other products. [0003] However, as far as the transistor components of the current thermal evaporation gate process are concerned, the gate metal deposition of the transistor components generally ado...

AI Technical Summary

Problems solved by technology

The traditional thermal evaporation method needs to consume a lot of money and energy, such as expensive equipment, the use of pump oil and the power consumed by related equipment, etc., which will cause environmental pollution and energy consumption.

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