Microelectromechanical system micromirror package

Abstract

The invention discloses a packaging structure of a micromirror with a micro electro mechanical system, which is used for carrying out wafer level lamination seal packaging on a micromirror with the micro electro mechanical system by utilizing the self peripheral frame of system micromirror with the micro electro mechanical system, which is characterized by comprising a top layer transparent cover plate, a middle layer micro electro mechanical system micromirror and a bottom layer substrate, wherein the micro electro mechanical system micromirror comprises a micromirror body and a micromirror surrounding silicon frame; the lower surface of the top layer transparent cover plate and the micromirror surrounding silicon frame form a cavity body capable of accommodating the micromirror body to move; the bottom layer substrate is used for supporting the micromirror with the micro electro mechanical system, and the micromirror with the micro electro mechanical system, the top layer transparent cover plate, the micromirror surrounding silicon frame and the bottom layer substrate form a closed cavity body; and the micromirror body is arranged in the closed cavity body. The packaging structure is the smallest packaging structure of the micromirror with the micro electro mechanical system, and has high production efficiency and lower cost. By adopting the packaging structure, the micromirror has strong anti-jamming capability and long service life.

Description

technical field

[0001] The invention relates to a micro-electromechanical system micromirror packaging, which belongs to the field of semiconductor electronic packaging, in particular to the field of MEMS device packaging. Background technique

[0002] Micro-electro-mechanical systems (MEMS for short) is a three-dimensional device manufactured by micro-machining technology, including at least one movable structure to satisfy a certain mechanical action. MEMS devices have a very broad application background in many fields. This is because MEMS has vigorously borrowed from the mature process technology of integrated circuits, so that the manufactured devices can integrate micro sensors, micro actuators, signal processing and control integrated circuits. In this century, more and more sensors and actuators tend to adopt MEMS technology, among which microelectromechanical system micromirrors are an excellent example. This is because although the force generated by the MEMS actu...

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