Crystalline silica solar energy cell PECVD rainbow film reworking method

A technology for solar cells and silicon solar cells, which is applied in the directions of cleaning methods, cleaning methods and utensils, chemical instruments and methods using liquids, etc., which can solve the problem of difficulty in cleaning, the influence of the surface flatness of silicon wafers, the influence of silk screen printing and the qualified products. rate, etc.

Active Publication Date: 2012-01-04
湖南红太阳新能源科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the different types of reworked wafers, some conventional cleaning solutions are difficult to clean. If the HF concentration is increased and the cleaning time is maintained for 5-6 minutes, because the high concentration

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0019] The first step is to use HF solution to remove normal Si from the cell 3 N 4 membrane;

[0020] The specific process of the first step is:

[0021] A. Mix HF and pure water according to the volume ratio of 12:100 into HF conventional cleaning solution;

[0022] B. Put the PECVD reworked film into HF solution to remove normal Si 3 N 4 membrane;

[0023] C. Rinse with deionized water.

[0024] The second step: Deeply clean the rainbow-shaped foreign matter remaining on the silicon wafer with a high-efficiency cleaning fluid to completely remove it.

[0025] The specific process of the second step is:

[0026] A, H 2 O:HF:HNO 3 According to the volume ratio of 60:100:1, it is formulated into a high-efficiency cleaning solution. H 2 The volume ratio of O is 60, the volume ratio of HF is 100, HNO 3 The volume ratio is 1;

[0027] B. Put the cells after cleaning in the first step into a high-efficiency cleaning solution. With the aid of nitric acid, the remaining traces can be quickly a...

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Abstract

The invention relates to solar energy cell sheet processing. Concretely the invention is a crystalline silica solar energy cell sheet plasma enhanced chemical vapor deposition (PECVD) method rainbow film reworking method which is a cleaning process method of a cell sheet having a rainbow film on a surface, and the rainbow film is caused by abnormal discharge in a process of preparing a crystalline silica solar energy cell sheet by utilizing a plasma enhanced chemical vapor deposition method. The cell sheet which is processed by the reworking method is subjected to film plating, printing, and sintering anew, conversion efficiency of the cell sheet can reach a normal level of a cell sheet, appearance of the cell sheet is the same as a normal cell sheet, and a purpose of reworking cleaning is achieved.

Description

technical field [0001] The present invention relates to the processing of solar cells, specifically, the present invention is a method for reworking crystalline silicon solar cell plasma-enhanced chemical vapor deposition (PECVD) rainbow sheets, that is, plasma-enhanced chemical vapor deposition to prepare crystalline silicon solar cells Cleaning treatment method for battery sheets with iridescent film layer on the surface caused by abnormal discharge in the sheet. Background technique [0002] At present, crystalline silicon solar cells have high requirements on appearance, and abnormal PE coatings caused by equipment stability in normal production are difficult to clean with conventional cleaning methods. These abnormal flakes include chromatic aberration, spots, uneven film thickness, rainbow flakes caused by abnormal discharge, etc. Among them, rainbow flakes are the most difficult to remove. These abnormal pieces will seriously affect the final yield and pass rate afte...

Claims

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Application Information

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IPC IPC(8): H01L31/18B08B3/08
CPCY02P70/50
Inventor 郭进刘海平任哲刘文峰罗亮
Owner 湖南红太阳新能源科技有限公司
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