External continuous feeding mechanism for monocrystal furnace

Abstract

The invention relates to auxiliary equipment for Czochralski silicon growth equipment, and aims to provide an external continuous feeding mechanism for a monocrystal furnace. The feeding mechanism includes a bunker with a seal cover; a discharge valve is arranged on bunker bottom; the discharge valve is connected to a discharge inner pipe, which is sleeved by a discharge outer pipe; the discharge outer pipe is connected with a transmission mechanism for realizing telescoping of the discharge outer pipe along a discharge inner pipe extending direction, and the discharge inner pipe, the discharge outer pipe and the transmission mechanism are all arranged inside an airtight cylinder; an airtight cylinder bottom is equipped with a globe valve or a flap valve; an feeding inlet is arranged on an upper part of a main furnace chamber of the monocrystal furnace, and is connected with the globe valve or the flap valve in an airtight way. According to the invention, material charging can be realized without furnace halt to facilitate continuous growth of multiple crystals and save time require by furnace halt, furnace rubbing, charging, vacuum-pumping and material melting, so as to substantially increase production efficiency and utilization rate of a quartz crucible and lower costs effectively.

Description

technical field

[0001] The invention relates to auxiliary equipment for Czochralski silicon single crystal growth equipment, in particular to an external continuous feeding mechanism for a single crystal furnace. Background technique

[0002] After the traditional Czochralski silicon single crystal furnace completes the raw material pulling production of the first furnace, it needs to do a lot of complicated preliminary work for the production of the new furnace, including stopping the furnace for cooling, cleaning the furnace, charging, vacuuming, chemicalizing materials, etc. process. These complicated pre-works waste a lot of time. This is because, the more feeding amount per production cycle, the heavier the drawn crystal, the smaller the unit energy, and the higher the efficiency. It has been 93 years since the Czochralski silicon single crystal growth furnace was put into use, but this situation has not been effectively improved. In addition, the quartz crucible its...

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