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Two-circuit integrated variable optical attenuator with teeterboard structure and manufacturing method thereof

A technology integrating variable light and seesaw, applied in the field of optical fiber communication, can solve problems such as large insertion loss, and achieve the effects of reducing volume, improving performance, and improving yield

Active Publication Date: 2012-01-11
SOI MICRO CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This method must split and couple the beam, which introduces a large insertion loss

Method used

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  • Two-circuit integrated variable optical attenuator with teeterboard structure and manufacturing method thereof
  • Two-circuit integrated variable optical attenuator with teeterboard structure and manufacturing method thereof
  • Two-circuit integrated variable optical attenuator with teeterboard structure and manufacturing method thereof

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Embodiment Construction

[0049] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the following further describes the present invention in detail in conjunction with specific embodiments and with reference to the accompanying drawings.

[0050] The invention uses three layers of silicon wafers to separately produce self-aligned V-shaped grooves, attenuation structures and driving electrodes, which can greatly reduce the difficulty of the production process and increase the yield. The symmetrical seesaw structure realizes two-way integration, which can effectively reduce the integration The volume of the device provides a reference for larger-scale integration.

[0051] The invention makes full use of the crystallographic characteristics of the silicon wafer in the manufacturing process, and manufactures the V-shaped groove, micromirror, cantilever and lower electrode structure through the method of combining anisotropic wet etching process and reactive io...

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PUM

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Abstract

The invention discloses a two-circuit integrated variable optical attenuator with a teeterboard structure and a manufacturing method thereof. The attenuator comprises two pairs of single mode fibers (1), a fiber locating structure (2), an upper movable electrode (3) with the teeterboard structure and a lower fixed electrode (4), wherein the fiber locating structure (2) is a V-shaped groove self-alignment structure etched on a silicon wafer; the upper movable electrode (3) comprises micromirrors (31, 31') and a teeterboard type cantilever (32), wherein the micromirrors (31, 31') are respectively located at two ends of the cantilever (32); and the lower fixed electrode (4) comprises a groove (41) etched on a silicon wafer and metal electrodes (42, 42') evaporated on the groove. The invention also discloses the manufacturing method of the two-circuit integrated variable optical attenuator with the teeterboard structure. In the invention, two-circuit integration is realized, the volume of a device is reduced, and the requirements of integration and small size of the current optical electronic devices are met.

Description

Technical field [0001] The invention relates to the technical field of optical fiber communication, in particular to a two-channel integrated variable optical attenuator with a seesaw structure and a manufacturing method thereof. Background technique [0002] Variable Optical Attenuator (VOA) is a core device in modern broadband optical networks. Optical attenuators can attenuate a predetermined amount of optical power, and have very important applications in scientific research and engineering fields such as optical fiber analog signal transmission and wavelength division multiplexing optical fiber networks. Because traditional large-volume mechanical optical attenuators have disadvantages such as large size, high cost, and high power, more and more reports of micromechanical optical attenuators have been in-depth in the research of micromechanical systems (MEMS) in recent years. Attenuators are mostly unit devices. In addition to maintaining the optical performance of the trad...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08B81B3/00
Inventor 周敬然张海英
Owner SOI MICRO CO LTD