Substrate conveying device and substrate conveying method for coating purpose

A transmission device and substrate technology, which is applied in the directions of transportation and packaging, conveyor objects, electrical components, etc., can solve the problems of large loading and unloading workload, unstable temperature and high production cost of substrates and metal fixing parts, and achieves a simple substrate transmission method. Practical, high utilization rate of source material, low production cost

Inactive Publication Date: 2012-01-11
上方能源技术(杭州)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The patent publication mentions that the substrate installed with the carrier device can be transported vertically, but the device has at least six disadvantages: first, installing more metal fixtures on the substrate will lead to reduced device safety and high substrate loss rate; Second, the contact between the substrate and the metal fixture cannot be coated, resulting in uneven coating of the substrate; third, the source material vapor wi

Method used

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  • Substrate conveying device and substrate conveying method for coating purpose
  • Substrate conveying device and substrate conveying method for coating purpose
  • Substrate conveying device and substrate conveying method for coating purpose

Examples

Experimental program
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Example Embodiment

[0040] Example one

[0041] Such as figure 1 with figure 2 As shown, the substrate transmission mechanism in the substrate transmission device includes a motor 2 and a plurality of transmission wheels 3 driven by the motor 2. The transmission wheels 3 are driven by a chain, and the cross section of the transmission wheel 3 is triangular (see Figure 3A ), the motor 2 and the transmission wheel 3 are used to realize the stable transmission of the substrate 1. The substrate support mechanism 4 is a fixed guide wheel, and the working surface 9 of the substrate support mechanism is the bottom of the substrate 1. If the substrate 1 is located in a high temperature environment, the materials of the transmission wheel 3 and the substrate support mechanism 4 must be high temperature resistant. The material of the transmission wheel 3 and the substrate support mechanism 4 is silicon carbide. In order to prevent the substrate 1 from overturning more effectively, the guide wheel is arrang...

Example Embodiment

[0043] Example two

[0044] The structure of the substrate transmission device for coating is the same as that of the first embodiment. The difference is that there are multiple motors 2. Each motor 2 is connected to a transmission wheel 3, and an elastic coupling 5 is connected between the transmission wheel 3 and the motor 2. The transportation of 1 has shock absorption and buffering effects; the substrate support mechanism 4 is a movable pulley, and the height from the bottom of the substrate 1 is four-fifths of the height of the substrate 1; the cross-sectional shape of the transmission wheel 3 is rectangular (see Figure 3B ), the spacing between the transmission wheels 3 is a quarter of the width of the substrate in the horizontal direction; the material of the transmission wheels 3 and the substrate support mechanism 4 is silicon nitride; in order to improve the uniformity of the edge coating, the effective coating of the coating source 6 The height is slightly larger than ...

Example Embodiment

[0047] Example three

[0048] The structure of the substrate transmission device used for coating is the same as that of the second embodiment, except that the material of the transmission wheel 3 and the substrate support mechanism 4 is quartz, and the cross-sectional shape of the transmission wheel 3 is arc (see Figure 3C ), the substrate support mechanism 4 is a slider that can move with the substrate 1.

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Abstract

The invention relates to a substrate conveying device and a substrate conveying method for coating purpose in the semiconductor industry, the flat-panel display industry, the solar industry, etc. The substrate conveying device for coating purpose comprises a substrate driving mechanism and also a substrate supporting mechanism which is dependent of the substrate driving mechanism. The substrate conveying method for coating purpose comprises the steps of placing substrates at one side or two sides of a coating source; orienting the to-be-coated surfaces of the substrates to the working surface of the coating source, with the distance between the substrates and the working surface being 1-100mm; and enabling the substrates to freely stand on the substrate driving mechanism at an angle of 65-115 DEG relative to the horizontal plane and meanwhile enabling the upper back surfaces of the substrates to lean on the substrate supporting mechanism so that the substrates are conveyed. In the invention, the substrate driving mechanism and the substrate supporting mechanism which are independent of each other are adopted, so that the substrates can freely stand without frames. The substrate conveying device allows continuous stable conveying and coating of the substrates by the coating source, guarantees uniform coating and achieves high raw material utilization rate and low production cost.

Description

technical field [0001] The invention relates to a substrate conveying device and a substrate conveying method for film coating in industries such as semiconductors, flat panel displays, and solar energy. Background technique [0002] The transmission scheme of non-flexible substrates, especially fragile substrates such as glass, largely determines the stability and yield of production. For fragile substrates, it is usually placed horizontally on parallel roller sets, but this solution is only suitable for the process with the film side up, and can only be used for coating a single substrate, and the production efficiency is low. To carry out double-sided simultaneous coating, the substrate needs to be transported vertically. The vertical transport of the prior art needs to use a substrate holder or manipulator (US2002 / 0078892, 2002-6-27) or a frame design, and the device for fixing the substrate needs to be connected with the substrate at the same time. The front and back s...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L21/00
Inventor 赵军梅芳
Owner 上方能源技术(杭州)有限公司
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