Substrate conveying device and substrate conveying method for coating purpose

Abstract

The invention relates to a substrate conveying device and a substrate conveying method for coating purpose in the semiconductor industry, the flat-panel display industry, the solar industry, etc. The substrate conveying device for coating purpose comprises a substrate driving mechanism and also a substrate supporting mechanism which is dependent of the substrate driving mechanism. The substrate conveying method for coating purpose comprises the steps of placing substrates at one side or two sides of a coating source; orienting the to-be-coated surfaces of the substrates to the working surface of the coating source, with the distance between the substrates and the working surface being 1-100mm; and enabling the substrates to freely stand on the substrate driving mechanism at an angle of 65-115 DEG relative to the horizontal plane and meanwhile enabling the upper back surfaces of the substrates to lean on the substrate supporting mechanism so that the substrates are conveyed. In the invention, the substrate driving mechanism and the substrate supporting mechanism which are independent of each other are adopted, so that the substrates can freely stand without frames. The substrate conveying device allows continuous stable conveying and coating of the substrates by the coating source, guarantees uniform coating and achieves high raw material utilization rate and low production cost.

Description

technical field [0001] The invention relates to a substrate conveying device and a substrate conveying method for film coating in industries such as semiconductors, flat panel displays, and solar energy. Background technique [0002] The transmission scheme of non-flexible substrates, especially fragile substrates such as glass, largely determines the stability and yield of production. For fragile substrates, it is usually placed horizontally on parallel roller sets, but this solution is only suitable for the process with the film side up, and can only be used for coating a single substrate, and the production efficiency is low. To carry out double-sided simultaneous coating, the substrate needs to be transported vertically. The vertical transport of the prior art needs to use a substrate holder or manipulator (US2002 / 0078892, 2002-6-27) or a frame design, and the device for fixing the substrate needs to be connected with the substrate at the same time. The front and back s...

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Problems solved by technology

The patent publication mentions that the substrate installed with the carrier device can be transported vertically, but the device has at least six disadvantages: first, installing more metal fixtures on the substrate will lead to reduced device safety and high substrate loss rate; Second, the contact between the substrate and the metal fixture cannot be coated, resulting in uneven coating of the substrate; third, the source material vapor will be deposited on the metal fixture, resulting in waste of source material; fourth, the cavity wall of the coating device is coated Seriously, the cleanliness of the device is poor, the temperature is unstable, and the utilization rate of source materials is low; fifth, the design of the carrier device is complicated and the production cost is high; sixth, the loading and unloading workload between the substrate and the metal fixture is large

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