Method for preparing three-dimensional nano space electrode by adopting self-alignment forming

A three-dimensional nano, self-aligned technology, applied in the fields of nanotechnology, nanotechnology, nanostructure manufacturing, etc., can solve the problem of shortage of three-dimensional nanostructure electrode preparation methods, and achieve the effect of improving selectivity

Active Publication Date: 2012-01-18
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
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Problems solved by technology

[0007] In view of this, the main purpose of the present invention is to provide a method for preparing three-dimensional nano-space electrodes by self-alignment molding, so as to so...

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  • Method for preparing three-dimensional nano space electrode by adopting self-alignment forming
  • Method for preparing three-dimensional nano space electrode by adopting self-alignment forming
  • Method for preparing three-dimensional nano space electrode by adopting self-alignment forming

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Embodiment Construction

[0036] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0037] Such as figure 1 as shown, figure 1 It is a flow chart of a method for preparing a three-dimensional nano-space electrode by self-alignment molding provided by the present invention, and the method includes the following steps:

[0038] Step 1: Fix the sample on the substrate, fix the substrate on the sample holder, and place the sample holder with the sample and substrate fixed on the sample stage in the vacuum chamber of the electron beam / ion beam dual beam equipment;

[0039] Step 2: Use an electron microscope to find a specific nanostructure on the sample, and then use focused ion beam or electron beam assisted deposition technology to grow platinum nanowires on the sample that form a certain angle with the su...

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Abstract

The invention discloses a method for preparing a three-dimensional nano space electrode by adopting self-alignment forming. The method comprises the following steps of: fixing a sample on a substrate, fixing the substrate on a sample support, and placing the sample support fixed with the sample and the substrate on a sample table in a vacuum cavity of electron beam/ ion beam double-beam equipment; finding a specific nano structure in the sample by adopting an electron microscope, and then growing a platinum nano wire for forming a certain included angle with the substrate on the sample by adopting a focusing ion beam/ electron beam assisted deposition technology; performing deformation operation on the prepared platinum nano wire by adopting a thermal annealing mode; and growing an electrode contact block or a connecting wire, and thus obtaining the three-dimensional nano space electrode. The preparation method for preparing a micro/nano structure not in a substrate supporting plane based on the phenomenon of regular deformation of the focusing ion beam/ electron beam assisted deposition thermally-annealed platinum nano wire has the characteristics of good flexibility and high controllability.

Description

technical field [0001] The present invention relates to the technical field of preparation of three-dimensional micro-nano devices, in particular to a method for preparing a three-dimensional curved micro-nano structure based on thermal annealing for deformation manipulation of free-standing focused ion beam-assisted or electron-beam-assisted deposition-grown platinum nanowires. It is especially suitable for the preparation of three-dimensional nano-space electrodes without destroying the original internal structure. Background technique [0002] With the development of nanotechnology, the research on the physical properties of low-dimensional materials has become more and more extensive, especially the research on one-dimensional nanowires has been carried out on a large scale. There are endless articles about various nanowires. In order to apply nanowires to For micro-nano-sized circuits, the measurement of the electrical properties of nanowires is essential. For mesoscop...

Claims

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Application Information

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IPC IPC(8): B82B3/00
Inventor 崔阿娟李无瑕罗强顾长志
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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