Method for preparing three-dimensional nano space electrode by adopting self-alignment forming

Abstract

The invention discloses a method for preparing a three-dimensional nano space electrode by adopting self-alignment forming. The method comprises the following steps of: fixing a sample on a substrate, fixing the substrate on a sample support, and placing the sample support fixed with the sample and the substrate on a sample table in a vacuum cavity of electron beam / ion beam double-beam equipment; finding a specific nano structure in the sample by adopting an electron microscope, and then growing a platinum nano wire for forming a certain included angle with the substrate on the sample by adopting a focusing ion beam / electron beam assisted deposition technology; performing deformation operation on the prepared platinum nano wire by adopting a thermal annealing mode; and growing an electrode contact block or a connecting wire, and thus obtaining the three-dimensional nano space electrode. The preparation method for preparing a micro / nano structure not in a substrate supporting plane based on the phenomenon of regular deformation of the focusing ion beam / electron beam assisted deposition thermally-annealed platinum nano wire has the characteristics of good flexibility and high controllability.

Description

technical field [0001] The present invention relates to the technical field of preparation of three-dimensional micro-nano devices, in particular to a method for preparing a three-dimensional curved micro-nano structure based on thermal annealing for deformation manipulation of free-standing focused ion beam-assisted or electron-beam-assisted deposition-grown platinum nanowires. It is especially suitable for the preparation of three-dimensional nano-space electrodes without destroying the original internal structure. Background technique [0002] With the development of nanotechnology, the research on the physical properties of low-dimensional materials has become more and more extensive, especially the research on one-dimensional nanowires has been carried out on a large scale. There are endless articles about various nanowires. In order to apply nanowires to For micro-nano-sized circuits, the measurement of the electrical properties of nanowires is essential. For mesoscop...

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Problems solved by technology

[0007] In view of this, the main purpose of the present invention is to provide a method for preparing three-dimensional nano-space electrodes by self-alignment molding, so as to solve the problem of the current shortage of three-dimensional nano-structure electrode preparation methods, and achieve The purpose of preparing three-dimensional nanostructured electrodes

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