Cleanout fluid used for cleaning after polysilicon texture preparation and preparation method thereof
A cleaning solution and post-cleaning technology, which is applied in chemical instruments and methods, after treatment, and crystal growth, can solve the problems of silicon wafer surface polishing, obvious color difference, and high reflectivity of silicon wafers, and achieve conversion efficiency and quality improvement. Low reflectivity, the effect of increasing the corrosion factor
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Embodiment 1
[0015] Embodiment 1: A method for preparing a cleaning solution for cleaning after polysilicon texturing, comprising the following steps, and the proportion of its components is calculated in parts by weight:
[0016] Take 99.6 parts of deionization and inject it into the cleaning tank, add 0.1 part of sodium hydroxide and stir well, the stirring speed is 60 rpm, and the stirring time is 5 minutes; then add 0.1 part of texturing additive, and after fully stirring evenly, you can get The finished product of the cleaning solution; the stirring speed is 55 rpm, and the stirring time is 6 minutes.
[0017] When in use, put 200 velvet silicon wafers into 150L of prepared cleaning solution for cleaning. After 160 seconds, the best cleaning effect will be achieved. The residual acid on the surface of the silicon wafers will be thoroughly cleaned, and the grain boundaries on the surface will be blurred. The reflectivity is 23.5%, and the surface consistency is good. The conversion eff...
Embodiment 2
[0018] Embodiment 2: A method for preparing a cleaning solution for cleaning after polysilicon texturing, comprising the following steps, and its component ratio is calculated in parts by weight:
[0019] Take 99.8 parts of deionization and inject it into the cleaning tank, add 0.2 parts of sodium hydroxide and stir well, the stirring speed is 60 rpm, and the stirring time is 5 minutes; then add 0.2 parts of texturing additives, after fully stirring, the stirring speed It was 65 rev / min, and the stirring time was 4 minutes; namely, the finished product of the cleaning solution was obtained.
[0020] When in use, put 200 velvet silicon wafers into 150L prepared alkaline solution for cleaning. The best cleaning effect will be achieved in 180 seconds. The residual acid on the surface will be thoroughly cleaned, the grain boundaries on the surface will be fuzzy, and the reflectivity will be 23%. , the surface consistency is good, and the conversion efficiency of this silicon wafer...
Embodiment 3
[0021] Embodiment 3: A method for preparing a cleaning solution for cleaning after polysilicon texturing, comprising the following steps, and its component ratio is calculated in parts by weight:
[0022] Take 99.7 parts of deionization and inject it into the cleaning tank, add 0.15 parts of sodium hydroxide and stir well, the stirring speed is 60 rpm, and the stirring time is 5 minutes; then add 0.15 parts of texturing additive, and after fully stirring, the stirring speed It is 60 revs / min, and the stirring time is 5 minutes; promptly obtains described cleaning solution finished product.
[0023] When in use, put 200 velvet silicon wafers into 150L prepared alkaline solution for cleaning. The best cleaning effect will be achieved in 200 seconds. The residual acid on the surface will be thoroughly cleaned, the grain boundaries on the surface will be fuzzy, and the reflectivity will be 23.8%. , the surface consistency is good, and the conversion efficiency of this silicon wafe...
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Abstract
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