Alternating-current electrochemical corrosion method of field emission electron source

Abstract

The invention discloses an alternating-current electrochemical corrosion method of a field emission electron source. According to the electrochemical corrosion method, an alternating-current signal source and a certain proportion of alkaline solution are adopted to form a novel electrochemical de-corrosion method. According to the alternating-current electrochemical corrosion method, corrosion conditions are optimized by controlling parameters of the depth of a single crystal tungsten wire, which is dipped into the liquid level of corrosive liquid, the concentration of the corrosive liquid, the amplitude of voltage, frequency of signals, and the like to obtain the optimal process parameters of corrosion, and therefore an ideal pinpoint shape is obtained. The corrosion method has the advantages of simpleness in operation and control, control accuracy, good stability, and success rate reaching more than 95 percent once the optimal conditions are obtained.

Description

technical field [0001] The invention relates to an electrochemical corrosion method, in particular to an alternating current electrochemical corrosion method for a single crystal tungsten wire of a field emission electron source. Background technique [0002] As an important tool for human beings to explore the microscopic world, the field emission electron microscope is widely used in many fields such as material science, life science, semiconductor industry, geology, energy, medical treatment, pharmaceuticals, etc., with its unique high-resolution and analytical performance. It plays a huge role in research and industrial production. [0003] The field emission electron source is one of the core components of the field emission electron microscope. Its performance determines the main electron optical performance parameters in the field emission electron microscope. It includes the emission angular current density of the electron gun, the total emission current of the elect...

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Problems solved by technology

However, the disadvantages are: the corrosion control circuit is complicated, the control program is troublesome, and there are many factors affecting corrosion control (corrosion current, concentration of corrosion solution, depth and verticality of tungsten wire immersed in corrosion solution, cleanliness of tungsten wire surface and environmental vibration, etc. ), and very sensitive, difficult to control, resulting in a low success rate

[0016] However, the current AC electrochemical corrosion method uses a fixed AC frequency of 50 Hz, and the two electrodes are placed in a wide-mouth corrosion container (such as: a beaker), with few adjustable parameters and large mutual interference between electrodes, making it difficult to obtain an ideal needle tip shape. , and the preparation success rate is not high

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