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Graphite boat (frame) dry-type cleaning machine

A dry cleaning machine, graphite boat technology, applied in cleaning methods and utensils, chemical instruments and methods, etc., can solve the problems of mechanical damage, time-consuming, low cleaning efficiency, etc., and achieve high cleaning efficiency, convenient operation, and cleaning effect. Good results

Inactive Publication Date: 2012-04-04
镇江大全太阳能有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, it has the following disadvantages: 1. The cleaning efficiency is low and takes a long time; 2. The use of high-concentration HF / HCl has certain risks; 3. The graphite boat needs to be disassembled, and there is a risk of additional mechanical damage

Method used

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  • Graphite boat (frame) dry-type cleaning machine
  • Graphite boat (frame) dry-type cleaning machine
  • Graphite boat (frame) dry-type cleaning machine

Examples

Experimental program
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Embodiment Construction

[0010] figure 1 In the illustrated embodiment, the graphite boat (frame) dry cleaning machine includes a reaction chamber 1 in which a graphite boat or a graphite frame can be placed. The inlet of the reaction chamber is connected to the NF3 gas source through an air inlet pipe 2, and the inlet of the reaction chamber is An even flow plate 3 is also provided, and the outlet of the reaction chamber is connected to the dry vacuum pump 4 through an exhaust pipe; a plasma generator 5 is installed on the intake pipe.

[0011] figure 2 In the illustrated embodiment, the graphite boat (frame) dry cleaning machine includes a reaction chamber 1 in which a graphite boat or a graphite frame can be placed. The inlet of the reaction chamber is connected to the NF3 gas source through an air inlet pipe 2. The reaction chamber inlet The outlet of the reaction chamber is connected to the dry vacuum pump 4 through an exhaust pipe; a radio frequency generator 6 is arranged outside the reaction cha...

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PUM

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Abstract

The invention relates to a device for maintaining the manufacturing facility of silicon-crystal cell battery, particularly to a graphite boat (frame) dry-type cleaning machine. The graphite boat (frame) dry-type cleaning machine comprises a reaction chamber in which a graphite boat or a graphite frame is disposed. The inlet of the reaction chamber is connected to the NF3 (Nitrogen trifluoride) gas source via an air intake pipe, while the outlet of the reaction chamber is connected to a dry-type vacuum pump via an air exhaust pipe; and said air intake pipe is provided with a plasma generator. The invention is able to remove the silicon nitride on the surface of the graphite boat by processing the reaction of the plasma silicon nitride, therefore the invention is featured in good cleaning effect, simple structure and manufacturing, convenient operation and high cleaning efficiency. Compared with the traditional wet-method chute-type cleaning, the cleaning process can be done without dismantling the graphite boat and external drying; in addition, the cleaning process can be done with higher efficiency and is capable of avoiding mechanical damage for the graphite boat.

Description

Technical field [0001] The invention relates to a device for the maintenance of silicon crystal solar cell production equipment, in particular to a graphite boat (frame) dry cleaning machine. Background technique [0002] In the production process of crystalline silicon solar cells, there is a key silicon nitride anti-reflection film deposition process. During the deposition of the silicon nitride anti-reflection film, the carrier of the crystalline silicon cell is a graphite boat or a graphite frame. Generally in the process of production, the graphite boat (frame) will also be deposited on the silicon nitride film. After a certain thickness (generally greater than 10um), the graphite boat (frame) needs to be cleaned. At present, the traditional cleaning method commonly used in the industry is to use HF / HCl mixed liquid wet tank cleaning, that is, the graphite boat is soaked in a tank containing HF / HCl for 4-8 hours, then rinsed with clean water, and then baked in a high-temper...

Claims

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Application Information

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IPC IPC(8): B08B7/00
Inventor 黄冲蒋维楠季高明
Owner 镇江大全太阳能有限公司
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