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Coating component and preparation method thereof

A technology for coating parts and film surfaces, applied in sputtering plating, ion implantation plating, vacuum evaporation plating, etc., can solve problems such as easy oxidation, shortened service life of coated parts, loss of efficacy, etc., and achieve dense film layer , protect the substrate, good high temperature oxidation resistance effect

Inactive Publication Date: 2012-04-04
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the TiN / NbN nanocomposite multilayer film has high hardness, when the application temperature is as high as 1000°C, the TiN / NbN nanocomposite multilayer film is easily oxidized and loses its efficacy, resulting in shortened service life of the coated parts

Method used

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  • Coating component and preparation method thereof
  • Coating component and preparation method thereof

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Embodiment Construction

[0018] see figure 1 , a preferred embodiment of the present invention, the coating member 100 includes a substrate 11 , a TiON film 13 formed on the surface of the substrate 11 and a NbON film 15 formed on the surface of the TiON film 13 .

[0019] The substrate 11 can be metal materials such as stainless steel, aluminum, aluminum alloy, magnesium or magnesium alloy.

[0020] The TiON film 13 can be formed on the substrate 11 by magnetron sputtering, and the thickness of the TiON film 13 is 50-500 nm.

[0021] The NbON film 15 can be formed by magnetron sputtering, and the thickness of the NbON film 15 is 50-500 nm.

[0022] A preferred embodiment of the present invention, the preparation method of coating member 100 comprises the following steps:

[0023] A substrate 11 is provided, and the substrate 11 can be stainless steel, aluminum, aluminum alloy, magnesium or magnesium alloy.

[0024] The substrate 11 is put into absolute ethanol for ultrasonic cleaning to remove the...

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Abstract

The present invention provides a coating component. The coating component comprises a substrate, a TiON film formed on the surface of the substrate, and an NbON film formed on the surface of the TiON film. The present invention further provides a preparation method for the coating component. The preparation method comprises the following steps: providing the substrate; forming the TiON film on the surface of the substrate; forming the NbON film on the surface of the TiON film. The TiON film and the NbON film prepared by the method of the present invention have high hardness and good high temperature oxidation resistance, and can provide effective protection effects for the substrate.

Description

technical field [0001] The invention relates to a coating piece and a preparation method of the coating piece. Background technique [0002] Superhard film refers to a solid film material with a microhardness ≥ 40Gpa. Due to its extremely high hardness, low coefficient of friction and thermal expansion, high thermal conductivity and good compatibility with the substrate, superhard films have important application prospects in industry. [0003] The study found that nanostructured multilayer films can obtain superior performance than single-layer films. For example, the hardness of the TiN film is only 21GPa, the hardness of the NbN film is only 14GPa, and the hardness of the TiN / NbN nanocomposite multilayer film is as high as 51GPa. Therefore, the TiN / NbN nanocomposite multilayer film is usually plated on the substrate to form a coated film, so as to strengthen the surface properties of the substrate and increase the service life of the substrate. Although the TiN / NbN nan...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35
Inventor 张新倍陈文荣蒋焕梧陈正士王莹莹
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD