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Polysiloxane compound, preparation method of polysiloxane compound, solidified film of display element and formation method of solidified film

A polysiloxane and display element technology, which is applied in the photoengraving process, static indicator, coating and other directions of the pattern surface, can solve the problem of difficult to form contact holes, etc., and achieves the improvement of adhesion and sufficient resolution. Effect

Active Publication Date: 2012-04-18
JSR CORPORATIOON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as such a negative radiation-sensitive composition, it is difficult to form a contact hole having a practical level of hole diameter.

Method used

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  • Polysiloxane compound, preparation method of polysiloxane compound, solidified film of display element and formation method of solidified film
  • Polysiloxane compound, preparation method of polysiloxane compound, solidified film of display element and formation method of solidified film
  • Polysiloxane compound, preparation method of polysiloxane compound, solidified film of display element and formation method of solidified film

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Experimental program
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Embodiment

[0195] The following synthesis examples and examples are given to describe the present invention more specifically, but the present invention is not limited to the following examples.

[0196] The number average molecular weight (Mn) and weight average molecular weight (Mw) of the hydrolyzed condensate of the hydrolyzable silane compound obtained by each synthesis example below were measured by the gel permeation chromatography (GPC) as follows.

[0197] Device: GPC-101 (manufactured by Showa Denko Co., Ltd.)

[0198] Column: GPC-KF-801, GPC-KF-802, GPC-KF-803, and GPC-KF-804 (manufactured by Showa Denko Co., Ltd.) connected together

[0199] Mobile phase: tetrahydrofuran

[0200] [A] Synthesis example of component polysiloxane

Synthetic example 1

[0202] In a container equipped with a stirrer, add 24 parts by mass of propylene glycol monomethyl ether, then add 39 parts by mass of methyltrimethoxysilane (MTMS), 18 parts by mass of 3-methacryloxypropyltrimethoxy Silane (MPTMS), heated to a solution temperature of 60°C. After the solution temperature reached 60° C., 0.1 parts by mass of formic acid and 19 parts by mass of ion-exchanged water were added, heated to 75° C., and kept for 2 hours. After cooling to 45°C, 28 parts by mass of methyl o-formate was added as a dehydrating agent, followed by stirring for 1 hour. Further, the temperature of the solution was set at 40° C., and the solution was evaporated while maintaining the temperature, thereby removing ion-exchanged water and methanol generated by hydrolytic condensation. Polysiloxane (A-1) was obtained by the above operation. The polysiloxane (A-1) had a solid content concentration of 35% by mass, a weight average molecular weight (Mw) of 1800, and a degree of dis...

Synthetic example 2

[0204]In a container equipped with a stirrer, add 21 parts by mass of propylene glycol monomethyl ether, then add 55 parts by mass of tetramethoxysilane (TEOS), 16 parts by mass of 3-methacryloxypropyltrimethoxysilane (MPTMS), heated to a solution temperature of 60°C. After the solution temperature reached 60° C., 0.1 parts by mass of formic acid and 23 parts by mass of ion-exchanged water were added, heated to 75° C., and kept for 2 hours. After cooling to 45°C, 33 parts by mass of methyl orthoformate was added as a dehydrating agent, and stirred for 1 hour. Further, the temperature of the solution was set at 40° C., and the solution was evaporated while maintaining the temperature, thereby removing ion-exchanged water, methanol and ethanol produced by hydrolytic condensation. Polysiloxane (A-2) was obtained by the above operation. The polysiloxane (A-2) had a solid content concentration of 33% by mass, a weight average molecular weight (Mw) of 2500, and a degree of dispers...

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Abstract

The invention relates to a polysiloxane compound, the preparation method of the polysiloxane compound, a solidified film of a display element and the formation method of the solidified film. The invention provides the polysiloxane compound which can make the required characteristics of the solidified films of display elements, like a protective film and an interlayer insulating film on a high level and balanced. The polysiloxane compound has the following components [A] to [D]: the [A] is the polysiloxane which is obtained by co-hydrolytically condensing the (a1) silicane compound which has the radical polymeric organic perssads and the (a2) silicane compound which does not have the radical polymeric organic perssads. The molar percentage of the (a1) silicane compound which has the radical polymeric organic perssads in the polysiloxane compound exceeds 15%. The [B] is the polysiloxane compound which does not have the radical polymeric organic perssads. The [C] is the radical polymerization initiator, and the [D] is the solvent.

Description

technical field [0001] The present invention relates to a polysiloxane composition suitable as a material for forming a cured film such as a protective film or an interlayer insulating film of a display element, a cured film formed from the composition, and a method for forming the cured film. Background technique [0002] Display elements such as liquid crystal display elements are dipped in solvents, acid or alkaline solutions, etc. during their manufacturing process, and when wiring electrode layers are formed by sputtering, the element surface is partially exposed to high temperatures. In order to prevent such immersion treatment and high-temperature treatment from deteriorating or damaging the display element, a protective film resistant to these treatments is provided on the surface of the element. [0003] For such a protective film, the following properties are required: high adhesion to the substrate or lower layer on which the protective film is to be formed, and t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/038G03F7/00G02F1/133
CPCC08G77/045C08J5/18C08K5/11C08L83/04C08L2201/02C08L2201/10C08L2203/16C08L2205/02C09D183/04
Inventor 铃木康伸本田晃久奥田务上田二朗
Owner JSR CORPORATIOON