Spraying equipment for barium coating on quartz crucible
A technology of quartz crucible and spraying equipment, applied in the field of quartz crucible barium coating equipment, can solve the problems of difficult realization of cost, difficult realization of injection of barium compound, etc., achieves reliable coating adhesion, reduces uneven spraying phenomenon, and overcomes quality reduction. Effect
Inactive Publication Date: 2016-06-01
LESHAN ZEERHUI TECH
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Problems solved by technology
Combining the technical content of the patent, it can be seen that it is difficult to use thermal energy to manufacture quartz crucibles and simultaneously inject barium compounds into the mold. This is because the quartz sand has filled the mold cavity. "Uniform" adhesion to the surface of the quartz crucible becomes a problem, and this method is difficult to achieve due to the impact of cost and equipment; in summary and combined with the published literature, the quartz crucible with barium coating is an urgent technical problem to be solved
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[0018] The present invention can be explained in more detail by the following examples, and the purpose of disclosing the present invention is intended to protect all changes and improvements within the scope of the present invention, and the present invention is not limited to the following examples;
[0019] combined with figure 1 Or the spraying equipment of barium coating on quartz crucible described in 2, comprising needle-punched basalt cloth pad 7, spraying bearing turntable 8, shaft 9, thrust roller bearing 19, base 16, toothed disc 20, vertical toothed disc 14, motor 11 , speed changer 12, casing 18, tachometer 22, constant temperature controller 23 and resistance heater box 10, the bottom in casing 18 is provided with base 16, and base 16 top is connected the lower end of shaft 9 by bearing, and at the bottom of shaft 9 The lower part of the toothed disc 20 is sleeved, and the upper part of the toothed disc 20 is provided with a thrust roller bearing 19. 19 The uppe...
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The invention relates to quartz crucible barium-spraying equipment, and relates to spraying equipment of a barium coating on a quartz crucible. According to the invention, a gear plate (20) is sleeved on the lower part of a shaft (9) in a casing (18). A thrust roller bearing (19) is arranged on the upper part of the gear plate. The upper part of the shaft is fixedly connected to the lower surface of a spraying bearing rotary table (8). A punched basalt fiber pad (7) is arranged on the upper part of the spraying bearing rotary table. The gear plate is engaged with a vertical gear plate (14) on one side. The vertical gear plate is connected to a power output terminal of a motor (11) through a connection sleeve (13). A tachometer (22) arranged on the front part of the casing communicates with the motor. A constant-temperature controller on the front part of the casing communicates with a resistor heater case. The resistor heater case is connected to a spray gun (2) through a pipeline. The spray gun is also provided with an air pipe (5) which is connected to an air pump. With the equipment provided by the invention, the service life of a quartz crucible is effectively prolonged, the crystal drawing yield in subsequent application is improved, and the strength of the quartz crucible is improved.
Description
【Technical field】 [0001] The invention relates to a barium coating equipment for a quartz crucible, in particular to a barium coating spraying equipment for a quartz crucible. 【Background technique】 [0002] As is known, quartz crucibles are one of the essential equipments for pulling large-diameter silicon single crystals. Currently, quartz crucibles are used below 1450 degrees and are roughly divided into two types: transparent and opaque. The translucent quartz crucible made by arc method is an essential basic material for drawing large-diameter single crystal silicon and developing large-scale integrated circuits. Today, developed countries in the world's semiconductor industry have replaced small transparent quartz crucibles with this crucible. It has the advantages of high purity, strong temperature resistance, large size and high precision, good heat preservation, energy saving, and stable quality. [0003] The 18-inch and 20-inch quartz crucibles commonly used in C...
Claims
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IPC IPC(8): C03C17/22
Inventor 沈福茂
Owner LESHAN ZEERHUI TECH