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A method for automatically stabilizing the arc current of an ion source

An ion source and arc stabilizing technology, applied in adaptive control, instruments, discharge tubes, etc., can solve problems such as increasing the difficulty of stable work and extending the loop, and achieve the goal of simplifying the arc starting workflow, reducing difficulty, and ensuring uniformity Effect

Active Publication Date: 2016-06-22
BEIJING SHUOKE ZHONGKEXIN ELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The intermediate thermal ion source has the characteristics of long life, which improves the reliability of the ion implanter and prolongs the maintenance cycle. However, due to the extended loop of the ion source’s arcing work, it is more difficult to stabilize the work.

Method used

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  • A method for automatically stabilizing the arc current of an ion source
  • A method for automatically stabilizing the arc current of an ion source

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Experimental program
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specific Embodiment approach

[0015] The present invention is described in further detail below in conjunction with specific embodiment:

[0016] The arc current generated by the ion beam is controlled by the filament power supply (5), the bias power supply (6), and the arc voltage power supply (4). Under high vacuum conditions, the filament (2) is first heated, and the filament power supply (5) supplies The filament (2) provides the power required for heating. When the heating temperature reaches the power required by the filament (2) to emit electrons, the filament (2) emits electrons, and the bias power supply (6) is connected between the filament (2) and the cathode (1). A certain bias voltage is applied between them, and under the acceleration of the bias voltage, the electrons hit the cathode (1) with a certain energy, which makes the cathode (1) heat up. In the same situation, when the temperature reaches the overflow work of electrons, electrons will be emitted from the surface of the cathode (1), ...

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Abstract

The invention discloses a method for automatically stabilizing the arc flow of an ion source. The ion source device includes a cathode (1), a filament (2), an arc chamber (3), an arc voltage power supply (4), a filament power supply (5), and a bias power supply (6). The method of automatically stabilizing the arc current is to detect the load current of the arc voltage power supply (4)—the change of the arc current, and use the PID controller to control the load current—the filament current of the filament power supply (5) that affects the cathode emission of electrons, to achieve The purpose of stabilizing the arc flow. A closed-loop control is formed between the filament power supply (5) and the arc voltage power supply (4), so that the arc current is automatically stabilized without manual or main control computer intervention.

Description

technical field [0001] The invention relates to a method for automatically stabilizing the arc flow of an ion source, which is applied to an ion implanter and belongs to the field of semiconductor device manufacturing. Background technique [0002] The ion source is the starting point of the optical path and the source of the ion beam. Its performance characteristics play a decisive role in many parameters of the beamline system and even the switchboard. The intermediate thermal ion source has the characteristics of long life, which improves the reliability of the ion implanter and prolongs the maintenance cycle. However, due to the extended loop of the ion source's arcing work, it is more difficult to stabilize the work. [0003] The filament power supply provides the power needed to heat the filament to emit electrons, and the bias power accelerates the electrons emitted by the filament to bombard the cathode of the ion source to achieve indirect heating of the cathode; th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B13/02H01J37/32
Inventor 唐景庭伍三忠孙勇林萍彭立波
Owner BEIJING SHUOKE ZHONGKEXIN ELECTRONICS EQUIP CO LTD