Thin film solar battery and manufacturing method thereof

Abstract

The invention relates to a thin film solar battery and a manufacturing method thereof. The thin film solar battery comprises a substrate, a first I-type semiconductor layer, a P-type semiconductor layer and a first electrode, a second I-type semiconductor layer, an N-type semiconductor layer and a second electrode, wherein the first I-type semiconductor layer, the P-type semiconductor layer and the first electrode are positioned at one side of the substrate in sequence, and the concentration of ions doped in the P-type semiconductor layer successively increases from the direction adjacent to the first I-type semiconductor layer to the direction far away from the first I-type semiconductor layer; the second I-type semiconductor layer, the N-type semiconductor layer and the second electrode are positioned at the other side of the substrate in sequence, and the concentration of ions doped in the N-type semiconductor layer successively increases from the direction adjacent to the second I-type semiconductor layer to the direction far away from the second I-type semiconductor layer. The invention has the beneficial effect that not only can the pollution of the P-type semiconductor layers or the N-type semiconductor layers to the I-type semiconductor layers be reduced, but also the larger band gap width can be obtained, and therefore, the photoelectric conversion efficiency is high.

Description

technical field [0001] The invention relates to the technical field of thin-film solar cells, in particular to a thin-film solar cell and a manufacturing method thereof. Background technique [0002] Thin-film solar cells are solar cells formed by depositing very thin (several micrometers to tens of micrometers) photoelectric materials on substrates such as glass, metal or plastic. Thin-film solar cells have a series of advantages such as power generation under weak light conditions, low energy consumption in the production process, and can greatly reduce raw material and manufacturing costs. They have become a research hotspot in recent years, and their market development potential is huge. [0003] Basic thin film solar cell structure, including single P-N junction, P-I-N / N-I-P and multi-junction. A typical single-junction P-N structure includes a P-type doped layer and an N-type doped layer. Single-junction P-N junction solar cells have two structures: homojunction and ...

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Problems solved by technology

[0006] But there is following defect in above-mentioned technology: when the doping concentration of the phosphorus ion in the phosphorus-doped layer 3 or the boron ion in the boron-doped layer 5 is higher, then the phosphorus-doped layer 3 or the boron-doped layer 5 will pollute the monocrystalline silicon substrate 4, thereby reducing the photoelectric conversion efficiency of the thin-film solar cell; when the doping concentration of the phosphorus ion in the phosphorus-doped layer 3 or the boron ion in the boron-doped layer 5 is low, the bandgap width of the thin-film solar cell will be reduced, thereby It will also reduce the photoelectric conversion efficiency of thin-film solar cells

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