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Coated member and preparation method thereof

A technology for coating parts and films, applied in the field of coating parts and their preparation, can solve the problems of shortening the service life of the coating parts, increasing the net electrons, increasing the conductivity of ZnO thin films, etc., and achieves improved service life, good stability, and high conductivity. rate effect

Inactive Publication Date: 2012-05-16
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the doping of Al leads to the increase of net electrons, and the conductivity of the ZnO film increases.
However, after a long period of use, the conductivity of the AZO film will be unstable, which will lead to the failure of the AZO film and greatly shorten the service life of the coated parts.

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  • Coated member and preparation method thereof
  • Coated member and preparation method thereof

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Embodiment Construction

[0016] see figure 1 According to a preferred embodiment of the present invention, the coating member 10 includes a substrate 11 and a transparent conductive film 13 formed on the surface of the substrate 11 .

[0017] The substrate 11 can be glass or ceramics.

[0018] The transparent conductive film 13 is a Me-doped aluminum-doped zinc oxide (AZO) film, where Me can be two of tin (Sn), bismuth (Bi), antimony (Sb), tantalum (Ta) and niobium (Nb). One or more kinds, wherein the mass percentage of Al can be 1-5%, the mass percentage of doped Sn can be 1-4%, and the mass percentage of doped Sb can be 1-2% %, the mass percentage of doped Bi can be 1-3%, the mass percentage of doped Nb can be 1-2%, and the mass percentage of doped Ta can be 1-2%.

[0019] The transparent conductive film 13 can be formed by magnetron sputtering or vapor deposition. The thickness of the transparent conductive film 13 may be 300-800nm.

[0020] The preparation method of the coating member 10 of a ...

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Abstract

The invention provides a coated member which comprises a base material and a transparent conductive film formed on the surface of the base material. The transparent conductive film is Me-doped AZO film, wherein Me is two or more then two of tin, bismuth, antimony, tantalum and niobium. For the coated member, the transparent conductive film is deposited on the surface of the base material, and a part of Zn2+ are replaced by two or more than two of high-valence Sn4+, Bi4+, Sb5+, Ta5+ and Nb5+ such that free electrons are produced to obtain high conductivity. The transparent conductive film has good stability and can effectively prolong the service life of the coated member. In addition, the invention also provides a manufacturing method of the coated member.

Description

technical field [0001] The invention relates to a coating piece and a preparation method thereof. Background technique [0002] Transparent conductive films are widely used in fields such as solar cells and liquid crystal displays due to their good electrical conductivity and visible light transmittance. Indium tin oxide (ITO) thin film is the most widely researched and applied transparent conductive thin film. Due to Sn 4+ Can replace In in the lattice 3+ position, free electrons are generated, so the ITO film has high conductivity. Since the ITO thin film contains the noble metal indium, the cost is high, and the researchers began to seek another alternative product. [0003] Zinc oxide is rich in raw materials, cheap, non-toxic and highly stable, so aluminum-doped zinc oxide (AZO) thin films are currently one of the most promising thin-film materials. After the ZnO film is doped with Al, the Al 3+ Ions occupy Zn in the lattice 2+ The position of the ion forms a mon...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/08C23C14/35
Inventor 张新倍陈文荣蒋焕梧陈正士黄嘉
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD