Raman spectrometer chip adopting arrayed waveguide grating
A technology of arrayed waveguide grating and Raman spectrometer, which is applied in the direction of optical waveguide coupling, Raman scattering, material excitation analysis, etc., can solve the problems of reduced optical performance, low wavelength resolution, large volume and weight, etc., and achieve high wavelength resolution High efficiency, high spectral resolution, small size effect
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[0015] Please check figure 1 , A Raman spectrometer chip using an arrayed waveguide grating, which includes a substrate 10, an arrayed waveguide grating 20, a light conducting member 30, a photodetector array 40, an input fiber 50 and a wedge waveguide 70. The arrayed waveguide grating 20 has a waveguide array output 60 for dispersing light of different specific wavelengths into different specific waveguides, and for making different specific waveguides output light of different specific wavelengths. In this embodiment, the substrate 10 is a silicon wafer, and the light conducting member 30 is a bevel mirror.
[0016] The input fiber 50, the wedge-shaped waveguide 70, the arrayed waveguide grating 20, and the inclined mirror 30 are sequentially coupled, so that the Raman scattered light is irradiated on the photodetector through the input fiber 50, the wedge-shaped waveguide 70, the arrayed waveguide grating 20, and the inclined mirror 30 in sequence. 器Array40. In this embodimen...
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