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Asymmetric miniature ultracapacitor based on MEMS technology and manufacturing method thereof

A technology of supercapacitor and manufacturing method, which is applied in the direction of microstructure technology, capacitor electrodes, capacitor parts, etc., to achieve the effect of high energy storage density

Active Publication Date: 2014-01-15
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this asymmetric energy storage system is difficult to realize on micro-devices through the methods in the previous literature, and the method of separating two electrodes containing different materials at the micron scale is the key and difficult point

Method used

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  • Asymmetric miniature ultracapacitor based on MEMS technology and manufacturing method thereof
  • Asymmetric miniature ultracapacitor based on MEMS technology and manufacturing method thereof
  • Asymmetric miniature ultracapacitor based on MEMS technology and manufacturing method thereof

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Embodiment Construction

[0044] Below in conjunction with accompanying drawing, the present invention is described in further detail:

[0045] Such as Figure 1a , Figure 1b As shown, the structure of the asymmetric micro-supercapacitor based on MEMS technology is as follows: a positive electrode composite layer 6 and a negative electrode composite layer 7 are sequentially arranged above the substrate 1, and the positive electrode composite layer 6 and the negative electrode composite layer 7 are arranged at intervals in the horizontal direction. There is a gap 8 between the positive electrode composite layer 6 and the adjacent negative electrode composite layer 7;

[0046] The structure of the positive electrode composite layer 6 is as follows: the insulating layer 5, the metal layer 4 and the positive electrode material 2 are sequentially installed on the substrate 1;

[0047] The structure of the negative electrode composite layer 7 is as follows: the insulating layer 5, the metal layer 4 and the...

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Abstract

The invention discloses an asymmetric miniature ultracapacitor based on MEMS (Micro Electro Mechanical System) technology and a manufacturing method thereof, and belongs to the technical field of micro-energy and MEMS processing. The asymmetric miniature ultracapacitor adopts the structure that positive pole composite layers and negative pole composite layers are sequentially arranged above a substrate and are arranged at intervals in the horizontal direction; gaps are reserved between the positive pole composite layers and the adjacent negative pole composite layers; and the positive pole materials and the negative pole materials are separately filled through micro processing technique and unique masking films. The invention has the benefits that the asymmetric miniature ultracapacitor with high energy storage density is successfully realized.

Description

technical field [0001] The invention belongs to the technical field of micro-energy and MEMS processing, in particular to an asymmetric micro supercapacitor based on MEMS technology and a manufacturing method thereof. Background technique [0002] Supercapacitor (Supercapacitor) is a kind of electrical energy storage device, which stores energy based on the following two types of capacitance: the electric double layer capacitance generated by the separation of positive and negative charges at the electrode material-electrolyte interface, or the crystallization of ions on the surface of the electrode material. Pseudocapacitance generated by fast intercalation-deintercalation / oxidation-reduction processes in the lattice. Compared with batteries, supercapacitors have higher output power, advantages in cycle life and efficiency, and better safety. With the rapid development and application of micro-miniature electronic devices and micro-electro-mechanical systems (MEMS), the de...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01G9/04B81B7/00B81C1/00
CPCY02E60/13
Inventor 王晓红申采为李四维
Owner TSINGHUA UNIV