Silicon micro two-dimension acceleration sensor based on self-resonant technology

Abstract

The invention discloses a silicon micro two-dimension acceleration sensor based on a self-resonant technology. The silicon micro two-dimension acceleration sensor based on the self-resonant technology comprises a substrate, fixed support of a cylinder structure, a cloverleaf-shaped inertial mass block, PN junctions and resonant micro beams, wherein the inertial mass block is suspended at the middle part of the fixed support through four symmetrically resonant micro beams and are positioned right above the substrate; and four PN junctions are symmetrically arranged on the substrate and are respectively positioned under the four resonant micro beams. The optical shock excitation of the resonant micro beams is realized by the silicon micro two-dimension acceleration sensor based on the self-resonant technology under the condition that a high-accuracy optical resonant cavity needs not to be processed, and the measurement for the acceleration can be realized through the differential frequency detection of the resonant micro beams; the whole silicon micro two-dimension acceleration sensor is of a symmetrical micro structure, and the sensitivities at two detection directions can be guaranteed to be consistent; larger sensitive mass can be realized under a limited volume; a frequency signal can be directly output, high anti-jamming capacity and stability are provided, and a processing circuit is simplified; and the mechanical contact does not exist between an exciting source and a vibrating element, the sensitivity is high, and the accuracy is high.

Description

technical field [0001] The invention belongs to the technical field of MEMS sensors, in particular to a silicon micro two-dimensional acceleration sensor based on self-resonance technology. Background technique [0002] At present, the technology of uniaxial miniature acceleration sensor is relatively mature. However, in some special applications, such as aircraft attitude control, missile guidance, battlefield robots, etc., it is often necessary to detect acceleration in two directions. Most of the early two-dimensional micro-acceleration sensors were a combination of two uniaxial micro-acceleration sensors, that is, two uniaxial micro-acceleration sensors were assembled orthogonally to each other. The performance of this assembled two-dimensional micro-acceleration sensor was limited by the The impact of precision is great, the consistency is poor, the integration is low, the volume is large, and it cannot be processed in batches. With the continuous improvement of the M...

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Problems solved by technology

[0003] However, whether it is a combined type, two independent acceleration sensors fabricated on the same substrate or a two-dimensional micro-acceleration sensor with a single sensitive mass element, there are problems such as serious cross-interference and inconsistent spindle sensitivity.

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