Manufacture method for planar lightwave circuit (PLC) light device

A manufacturing method and device technology, applied in the manufacturing of optical waveguides and planar optical splitters, can solve the problems of high raw material requirements, difficult manufacturing, high maintenance costs, etc., achieve simple process, reduce production costs, and realize The effect of industrial scale production

Inactive Publication Date: 2012-07-04
SUZHOU ORIENTAL SEMICONDUCTOR CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the problem exists in high investment in equipment, high maintenance costs, and high requirements for raw materials (all imported materials are used), and this technology is difficult to manufacture

Method used

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  • Manufacture method for planar lightwave circuit (PLC) light device
  • Manufacture method for planar lightwave circuit (PLC) light device
  • Manufacture method for planar lightwave circuit (PLC) light device

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Embodiment Construction

[0024] The present invention will be further described in detail below with reference to the drawings and specific embodiments. In the drawings, for convenience of description, the thickness of layers and regions are enlarged or reduced, and the sizes shown do not represent actual sizes. Although these diagrams do not completely accurately reflect the actual size of the device, they still completely reflect the mutual position between the regions and the constituent structures, especially the upper and lower and adjacent relationships between the constituent structures. At the same time, in the following description, the term substrate used can be understood to include the semiconductor substrate being processed, and may include other thin film layers prepared thereon.

[0025] Figure 2a This is a schematic diagram of an embodiment of the optical waveguide provided by the present invention, where the direction indicated by ab is the propagation direction of light in the optical w...

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Abstract

The invention belongs to the technical field of planar lightwave circuit (PLC) splitters, particularly relates to a manufacture method for a lightwave guide, and comprises the steps of enabling a layer of silicon dioxide to grow on a silicon wafer; performing deposition of photoresist; performing photoetching to form a pattern; forming an optical waveguide core layer with a high refractive index in a groove between the photoresist; stripping the photoresist; and forming a film wrapping layer with a low refractive index. The manufacture method for the lightwave guide is simple in process, low in technical difficulty and requirements of raw materials and production devices, reduces production cost, and easily achieves industrialized mass production.

Description

Technical field [0001] The invention relates to a method for manufacturing a planar lightwave circuit (Planar Lightwave Circuit, PLC), in particular to a method for manufacturing an optical waveguide, and belongs to the technical field of PLC splitters. Background technique [0002] At present, the construction of FTTX (fiber access network) is gradually unfolding, specifically to achieve FTTC (fiber to the roadside), FTTB (fiber to the building), FTTH (fiber to the home), FTTD (fiber to the desktop), triple play ( Voice network, data network, cable television network) and other multimedia transmission and PDS (premises wiring system) solutions. To build an all-optical network, in addition to various structural distribution cables and drop cables to realize the connection and redistribution of the optical fiber network, a large number of optical splitters are also needed to finally complete the purpose of fiber to the home. [0003] PLC optical devices are generally made on six ma...

Claims

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Application Information

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IPC IPC(8): G02B6/136
Inventor 王鹏飞刘磊刘伟
Owner SUZHOU ORIENTAL SEMICONDUCTOR CO LTD
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