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Accurately quantitative calculation method for near-field ultrasonic levitation force

A technique of quantitative calculation and suspension force, applied in calculation, special data processing application, instrument, etc.

Inactive Publication Date: 2012-07-11
SHANGHAI JIAO TONG UNIV
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, this method can only describe the distribution of sound waves, and lacks the corresponding mapping model of vibration-acoustic field-levitation force, so the magnitude of levitation force cannot be quantitatively obtained
In addition, because this method is suitable for the standing wave ultrasonic field generated by the large volume flow field, it cannot effectively measure the sound field distribution in the gas film where the near-field ultrasonic is located.

Method used

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  • Accurately quantitative calculation method for near-field ultrasonic levitation force
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  • Accurately quantitative calculation method for near-field ultrasonic levitation force

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Embodiment Construction

[0057] Embodiments of the present invention are described in detail below in conjunction with accompanying drawings:

[0058] This embodiment is carried out on the premise of the technical solution of the present invention. Taking the piezoelectric ceramic transducer to generate near-field ultrasound as an example, the detailed implementation and specific operation process are given below, but the protection scope of the present invention is not Limited to the following examples.

[0059] This embodiment is completed on the self-designed near-field ultrasonic suspension test platform. The ultrasonic generating device is composed of Langzhiwan piezoelectric vibrator + horn + sound radiation disc, such as figure 1 shown. Place a reflecting plate 2 with the same diameter as the vibrating plate directly above the vibrating plate 1 to form a reflecting surface, and the gas between the two is an extruded gas film 3 to form a sound field. Since the extruded gas film is very thin,...

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Abstract

An accurately quantitative calculation method for near-field ultrasonic levitation force can be used for modeling, designing and optimizing of a non-contact type ultrasonic levitation system and a transmission positioning system. The accurately quantitative calculation method includes: building a finite element model of an ultrasonic generating device, performing model analysis and harmonic response analysis, building one-to-one mapping relation of driving input and output, building an extrusion gas-film kinetic model considering inertia of gas and determining parameters of the model; obtaining a specific format of numerical solution of the parameters of the model according to difference scheme; and acquiring gas pressure and levitation force of an extrusion gas film by the numerical solution. By the accurately quantitative calculation method, accuracy in modeling and solving is improved as compared with that of the prior art. Besides, the accurately quantitative calculation method is accurate and feasible for production design and optimization of ultrasonic equipment.

Description

technical field [0001] The present invention relates to the field of advanced electronic manufacturing, more specifically, to a quantitative calculation method in the field of non-contact support technology based on near-field ultrasound, which can be used for modeling, design and optimization of non-contact ultrasonic suspension systems and transmission positioning systems . Background technique [0002] In the field of semiconductor manufacturing and micro-electromechanical systems (MEMS) technology, higher requirements are put forward for precision work units such as wafer transportation and precision positioning, assembly and operation of tiny MEMS parts. For example, in the process of wafer polishing and photolithography, the wafer needs to be transferred, buffered and precisely positioned. The surface of the wafer has extremely strong mechanical surface sensitivity, and its thickness is between 0.5 and 2mm. During its transmission and precise positioning, the surface ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/50
Inventor 李锦刘品宽丁汉
Owner SHANGHAI JIAO TONG UNIV
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