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High vacuum valve of large diffusion pump vacuum set

A technology of vacuum unit and diffusion pump, which is applied in the direction of valve lift, valve details, valve device, etc., can solve the problems of high requirements on the height of the factory building, and achieve the effect of reducing the overall height, reducing the cost of use and making the cost cheap

Active Publication Date: 2012-07-18
DONGGUAN HUICHENG VACUUM TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide a high-vacuum valve with a relatively short valve height, so as to solve the problem in the prior art that large-scale coating equipment has higher requirements on the height of the factory building

Method used

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  • High vacuum valve of large diffusion pump vacuum set
  • High vacuum valve of large diffusion pump vacuum set
  • High vacuum valve of large diffusion pump vacuum set

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Embodiment Construction

[0026] The present invention will be further described below in conjunction with accompanying drawing:

[0027] Such as figure 1 , 2 As shown, the high vacuum valve of the preferred embodiment of the present invention includes a valve body, the valve body is composed of an upper valve body 5 and a lower valve body 2, the upper and lower valve bodies 5, 2 are at the same level, and the two nozzle axes of the valve body Vertical, one side of the nozzle is circular, the direction is downward, and a connecting flange 1 is welded, through which the connection flange 1 is connected to the diffusion pump, and the other side of the nozzle is a rectangular opening, which is connected to the coating chamber of the coating machine through the connecting flange 6 .

[0028] The lower valve body 2 is a cylinder with a U-shaped horizontal cross-section, and the U-shaped horizontal part is a wide, long, high-short square transition tube connected to the upper valve body 5, and the nozzle...

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Abstract

The invention discloses a high vacuum valve of a large diffusion vacuum set, comprising a valve body consisting of an upper valve body and a lower valve. A valve cover is arranged between the upper valve body and the lower valve body and is communicated with a perforated valve base plate or closes the upper valve body and the lower valve body, and the upper valve body and the lower valve body arepositioned on the same level; and the valve base plate is obliquely arranged at 45 degrees, and one side of the valve cover is hinged on the upper valve body through a horizontal shaft. According to the invention, the upper valve body and the lower valve body are horizontally arranged, and the valve cover is changed from vertical lifting movement perpendicular to the valve base plate to the open and close movement at a turning angle of 45 degrees relative to the valve base plate, which greatly reduces the height of the high vacuum valve, so as to greatly reduce the overall height of equipment, and solve the problem that a large-scale film coating equipment has high requirements on the height of a workshop building. In this way, the high vacuum valve can adapt to common floor height, so asto greatly improve the adaptability to large-scale film coating equipment.

Description

technical field [0001] The invention relates to a high vacuum valve, in particular to a high vacuum valve structure connecting a large vacuum coating machine and a diffusion pump unit. Background technique [0002] Large-scale vacuum coating machines are equipped with large-scale vacuum units. Many large-scale vacuum coating machines, especially vacuum evaporation coating machines for plastic products and metal products, mostly use large-scale diffusion pump vacuum units. [0003] For a long time, the top of the diffusion pump has been equipped with a cold trap, which is equipped with a high-vacuum valve in a vertical combination, and the valve top is often the highest point of the equipment. There are two types of pneumatic high vacuum valves: vertical and flat. Take the 800 diffusion pump as an example, the diffusion pump is 1807mm high, the cold trap is 150mm, the vertical valve is 1790mm, the total is 3747mm, plus the maintenance space is 500mm, and the elevation should...

Claims

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Application Information

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IPC IPC(8): F16K1/20F16K31/12F16K51/02
Inventor 李志荣李志方罗志明李秋霞
Owner DONGGUAN HUICHENG VACUUM TECH
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