Multi-field coupled loading micro nanometer press-in testing system and method

Abstract

The invention relates to a multi-field coupled loading micro nanometer press-in testing system and a multi-field coupled loading micro nanometer press-in testing method. The system comprises a mechanical loading and measurement sub system, a magnetic field loading and measurement sub system, an electric field loading and measurement sub system, and a circulating oil bath heating field loading and measurement sub system; a variable magnetic field is applied by controlling the magnitude of current flowing through an electromagnet; a variable electric field is applied by a high-precision voltage-stabilizing power supply, and the electric field is applied in different directions of a test sample by adjusting the position distribution of positive and negative electrodes on the test sample; and silicone oil is heated in a heating area, and flows to an oil bath cavity through an oil path, and the test sample is heated by a test sample platform through heat conduction. The multi-field coupled loading micro nanometer press-in testing system has a compact structure, has high practical value, and can detect micro and nano scalephysico-mechanical properties of an electromagnetic solid film material accurately; and the principle is reliable.

Description

technical field [0001] The invention relates to a testing system and testing method for testing the physical and mechanical properties of an electromagnetic solid thin film material under the coupled action of an electric field, a magnetic field and a thermal field, and belongs to the technical field of material analysis instruments and micro-nano mechanical testing. Background technique [0002] Ferroelectric, piezoelectric, ferromagnetic and other electromagnetic functional materials and their composite materials have the advantages of excellent force-to-electromagnetic conversion function, fast response speed, and small size, and are currently widely used in sensors, actuators, transducers, and memory devices. , capacitors, thermal resistors and other fields. With the development of micro-nano material preparation and processing technology, the characteristic size of more and more electromagnetic functional materials has entered the micro-nano scale, such as ferroelectric...

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Problems solved by technology

There are four main reasons: First, coils are usually used for the application of variable magnetic fields in material testing. However, the heating problem caused by the thermal effect of current will cause the temperature around the coil to rise, which is very important for heat-sensitive micro-nano testing. The technology will be extremely unfavorable, directly affecting the accuracy of the test results; second, the application of the thermal field usually uses resistance wire heating, however, due to the inevitable generation of a magnetic field when the current passes through the resistance wire, it will affect the ability of the test piece area to add a magnetic field. Therefore, it is necessary to develop a thermal field application method that does not interfere with the magnetic field; thirdly

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