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Z-axis servomotor integrated with power-off braking device

A technology of servo motors and braking devices, which is applied in the direction of electromechanical devices, electric components, and control of mechanical energy. It can solve the problems of insufficient response and insufficient braking torque, and achieve shortened response time, large braking torque, and simplified assembly. program effect

Inactive Publication Date: 2013-07-03
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention is to solve the problem that the braking device of the existing Z-axis servo motor is not fast enough to respond and the braking torque is not large enough, and proposes a Z-axis servo motor with integrated power-off braking device

Method used

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  • Z-axis servomotor integrated with power-off braking device
  • Z-axis servomotor integrated with power-off braking device

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specific Embodiment approach 1

[0011] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS 1. A Z-axis servo motor integrated with a power-off braking device, which is composed of a Z-axis servo motor 12 and a power-off braking device, and the power-off braking device is fixed at the output of the Z-axis servo motor 12 On the end face of one side of the shaft, the power-off braking device includes an annular side wall 11, a fixed friction plate 2, a distance positioning sleeve 3, a tooth cog 4, a tooth insert friction plate 5, a movable friction plate 6, an elastic device 7 and solenoid coil 8,

[0012] The annular side wall 11 is fixed on the end cover of the Z-axis servo motor 12, and the annular side wall 11 is coaxial with the output shaft of the Z-axis servo motor 12;

[0013] The electromagnet coil 8 is set on the outside of the Z-axis motor shaft 10 of the Z-axis servo motor 12, and is fixedly connected with the end cover of the Z-axis servo motor 12, and there is a gap between the inner wall of the ele...

specific Embodiment approach 2

[0019] Embodiment 2. The difference between this embodiment and Embodiment 1 is that this embodiment is a further limitation of Embodiment 1, and the elastic device 7 is realized by a spring.

specific Embodiment approach 3

[0020] Embodiment 3. The difference between this embodiment and Embodiment 1 is that this embodiment is a further limitation of Embodiment 1. The elastic device 7 is realized by a spring, which is sleeved on the Z-axis motor shaft 10 .

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Abstract

Disclosed is a Z-axis servo motor integrated with a power-off braking device, for solving the problems of existing braking devices for Z-axis servo motors having insufficiently rapid response and insufficiently large braking torque. The invention is composed of a Z-axis servo motor (12) and a power-off braking device. The power-off braking device comprises an annular sidewall (11), a fixed friction plate (2), a spacer sleeve (3), a clutch gear (4), a clutch friction plate (5), a movable friction plate (6), an elastic device (7) and an electromagnet winding (8). The annular sidewall (11) is fixed to an end cover of the Z-axis servo motor (12); the electromagnet winding (8) encases a Z-axis motor shaft (10) of the Z-axis servo motor (12); the elastic device (7) is arranged between the movable friction plate (6) and the end cover of the Z-axis servo motor (12); the clutch friction plate (5) encases the Z-axis motor shaft (10); the clutch gear (4) is located between the Z-axis motor shaft (10) and the clutch friction plate (5) and is in a slidable meshed connection with the clutch friction plate (5); and the fixed friction plate (2) encases the Z-axis motor shaft (10) and the spacer sleeve (3) is provided between the fixed friction plate and an end face of the Z-axis servo motor (12).

Description

technical field [0001] The invention belongs to the field of semiconductor chip equipment manufacturing, and relates to a Z-axis driving device of a silicon chip transmission robot, in particular to a Z-axis servo motor integrated with a power-off braking device. Background technique [0002] The Z-axis mechanism of the silicon wafer transfer robot is equipped with a Z-axis servo motor as a power source, and the rotary motion of the servo motor is converted into a linear motion along the Z-axis direction through a screw nut mechanism. Since the Z-axis is defined in the direction perpendicular to the horizontal plane, which is the same as the direction of gravity of the earth, the equipment suddenly encounters a power outage during work and loses the power support of the motor. Under the gravity of the upper mechanism of the Z-axis load, it will move along the Z-axis The screw guide mechanism slides down by itself, which is very likely to cause damage to the equipment and the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02K7/102
CPCH02K7/1023
Inventor 刘延杰吴明月荣伟彬孙立宁
Owner HARBIN INST OF TECH
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