Verifying device of grating groove defect

A defect inspection and grating technology, which is applied in the direction of using optical devices, optical testing flaws/defects, measuring devices, etc., can solve the problems of grating line defects, inconsistencies, main scale stains, front and rear phases, etc., and achieve the effect of simple principle

Inactive Publication Date: 2012-08-08
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In order to solve the problem that the existing grating ruler has stains and phase inconsistencies between the front and rear in the manufacturing process of

Method used

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  • Verifying device of grating groove defect
  • Verifying device of grating groove defect
  • Verifying device of grating groove defect

Examples

Experimental program
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Embodiment Construction

[0012] combine figure 1 Describe this embodiment, the grating line defect inspection device, the detection device includes a standard grating 3, a signal detection head 1, a first displacement drive device 7, a second displacement drive device 9, a signal processing module 8, and a pulse detection module 10 , The signal detection head 1 further includes a light source 5 , an optical system 6 , and a signal detection chip 2 . The first displacement drive device 7 drives the signal detection head 1 to move the position; the second displacement drive device 9 drives the standard grating 3 to move the position; the signal processing module 8 pairs the signal detection head 1, the first displacement drive device 7, the second displacement drive device The information obtained by the two-shift driving device 9 is converted and processed; the pulse detection module 10 is used to analyze and calculate the phase distribution of the grating to be measured 4; the standard grating 3 is a ...

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Abstract

A verifying device of a grating groove defect aims at resolving the problem that a main ruler has the conditions of stain and inconsistency of front and back phases in the manufacture process of a grating ruler, and a manual method cannot finish verifying of the grating ruler. A first shifting driving device of the verifying device drives a signal detection head to move along the detection direction, the signal detection head detects light transmitted by a light source and modulated by a grating to be measured and a standard grating, the light is converted into electric signals through a photoelectric detector, amplification processing and analog-digital conversion are conducted through a signal processing module on the electric signals, finally a pulse detection module is used for detecting and scoring the defect and copying existence and position of the defect through pulse signals, a second shifting driving device moves the position of the standard grating, and the processing is repeated till the detection finished. The verifying device is used for measuring the defect of long grating, groove evenness detection and phase consistency detection of a length grating ruler.

Description

technical field [0001] The invention relates to a device for inspecting line defects of a grating ruler. Background technique [0002] The primary task of achieving high-precision measurement of grating displacement sensors is to ensure the scoring and copying accuracy of standard gratings. The marking accuracy is usually relatively high, but there are also cases where the black-and-white ratio does not meet the requirements; The stains caused, or the certain distortion of the light will affect the phase consistency, etc., which will seriously affect the accuracy of the final grating ruler. Not only that, the lengthening error existing in the grating lengthening process will also greatly reduce the accuracy and performance of the entire grating scale. [0003] After the general grating scale is marked or copied, due to the large amount of data, it is impossible to fully detect the marking accuracy with the naked eye by using a general microscope. At the same time, the inco...

Claims

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Application Information

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IPC IPC(8): G01N21/88G01B11/02
Inventor 吴宏圣曾琪峰乔栋张吉鹏孙强甘泽龙
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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