Verifying device of grating groove defect

Abstract

A verifying device of a grating groove defect aims at resolving the problem that a main ruler has the conditions of stain and inconsistency of front and back phases in the manufacture process of a grating ruler, and a manual method cannot finish verifying of the grating ruler. A first shifting driving device of the verifying device drives a signal detection head to move along the detection direction, the signal detection head detects light transmitted by a light source and modulated by a grating to be measured and a standard grating, the light is converted into electric signals through a photoelectric detector, amplification processing and analog-digital conversion are conducted through a signal processing module on the electric signals, finally a pulse detection module is used for detecting and scoring the defect and copying existence and position of the defect through pulse signals, a second shifting driving device moves the position of the standard grating, and the processing is repeated till the detection finished. The verifying device is used for measuring the defect of long grating, groove evenness detection and phase consistency detection of a length grating ruler.

Description

technical field [0001] The invention relates to a device for inspecting line defects of a grating ruler. Background technique [0002] The primary task of achieving high-precision measurement of grating displacement sensors is to ensure the scoring and copying accuracy of standard gratings. The marking accuracy is usually relatively high, but there are also cases where the black-and-white ratio does not meet the requirements; The stains caused, or the certain distortion of the light will affect the phase consistency, etc., which will seriously affect the accuracy of the final grating ruler. Not only that, the lengthening error existing in the grating lengthening process will also greatly reduce the accuracy and performance of the entire grating scale. [0003] After the general grating scale is marked or copied, due to the large amount of data, it is impossible to fully detect the marking accuracy with the naked eye by using a general microscope. At the same time, the inco...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem that the existing grating ruler has stains and phase inconsistencies between the front and rear in the manufacturing process of the existing grating ruler, and the problem that the grating ruler cannot be inspected manually, it provides a device for inspecting the defects of the grating line

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