Plane array type electromagnetic sensor with trapezoidal structure
An electromagnetic sensor and planar array technology, which is applied in the field of planar electromagnetic sensors, can solve problems such as weak output signals, poor adaptability to detection objects, and poor sensor consistency, so as to enhance output signal strength, improve quantitative detection capabilities, and improve spatial resolution. Effect
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[0020] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0021] Such as figure 1 , figure 2 , image 3 and Figure 4 As shown, the planar array electromagnetic sensor with trapezoidal structure of the present invention includes a flexible substrate 1, the flexible substrate 1 is made of polyimide, and a conductive metal layer is first plated on both sides of the flexible substrate 1 by electroplating or sputtering. , such as copper, gold, etc.; a primary coil 2 and a pair of excitation electrodes 6 are provided on one side of the flexible substrate 1, and a secondary coil array 3 and an output electrode pair 7 are provided on the other side of the flexible substrate 1. The coil array 3 forms a trapezoidal periodic structure, the secondary coil array 3 is composed of more than four secondary detection coils, and each half period of the main coil 2 contains four secondary detection coils ...
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