Method for removing top chamfering of BD-R (Blue Dish-Ray) mother disc groove

Abstract

The invention relates to a method for removing a top chamfering of a BD-R (Blue Dish-Ray) mother disc groove. The method comprises the following steps of: preparing a substrate to be burnt, drying, laser-burning, developing, sputtering and electroplating. When the substrate to be burnt is prepared, a water flushing step in the tradition technology is saved, thus a layer of base gel is left, a layer of intermediate-layer reactant which is not easily developed is generated due to the reaction between the upper layer of the base gel and the lower layer of photoresist after photoresist spun on a base gel layer is spin-dried, the developing at the edge of a groove stops when the developing reaches to the intermediate-layer reactant, the forming of the top chamfering of the BD-R mother disc groove is prevented, and the mother disc quality is increased.

Description

technical field [0001] The invention relates to a processing technology of a BD-R master disc, in particular to a method for removing chamfers at the top of a groove of a BD-R master disc. Background technique [0002] BD-R master disc is the abbreviation of Blu-ray master disc which can be written once. Its production process mainly includes primer spin coating, photoresist spin coating, drying, laser recording, development, vacuum sputtering, electroplating, etc., among which, The traditional primer spin-coating process for the primer material is disilane and water consists of four steps: [0003] 1: The glass rotates at a low speed, and the primer is coated on the glass surface and covers the entire surface of the glass disc. [0004] 2: The glass is static, and the primer and the glass react. [0005] 3: After the reaction is completed, flush with water to wash away the excess primer. [0006] 4: The glass plate is rotated at high speed and dried. [0007] Through th...

AI Technical Summary

Problems solved by technology

[0008] However, for the master disk produced by the above-mentioned traditional production process, the top of the groove usually formed on the master disk is prone to chamfering structure, such as figure 1 As shown, the formation of the chamfer structure is mainly reflected in the development process: at the beginning of the development stage, the development direction is mainly downward, and the development speed is fast in the center of the groove, and gradually slows down toward the edge of the groove.

But when the development at the center position reaches the glass surface, the downward development at the center position will stop, and there will be a very slow development along the glass surface at the edge of the groove, which will lead to the chamfering of the top of the groove, see figure 2

The existence of the chamfer structure will have a serious adverse effect on the subsequent replication process of the master disc, thus affecting the quality of the entire master disc

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