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Method for manufacturing surface acoustic wave transducer sensitive membrane

A technology of surface acoustic wave and sensitive film, which is applied in the direction of using sound wave/ultrasonic wave/infrasonic wave to analyze fluid, vacuum evaporation plating, coating, etc. It can solve the problems of low applicable value, high working temperature, and low selectivity of sensors

Inactive Publication Date: 2012-09-19
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] Through research we know that WO 3 It is a multifunctional semiconductor oxide, which is widely used in the field of surface acoustic wave sensors. It is reported in the literature that it is mainly used to detect NO 2 gas, but will single WO 3 Sensors prepared as thin film materials have low selectivity, high operating temperature, and low applicable value

Method used

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  • Method for manufacturing surface acoustic wave transducer sensitive membrane
  • Method for manufacturing surface acoustic wave transducer sensitive membrane

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Embodiment

[0030] The production provided by the embodiment of the present invention is used to detect NO 2 The method of the sensitive film of the surface acoustic wave sensor of the gas is to use about 1g of WO with a mass ratio of 1:1 3 with TiO 2 Mix according to the material, and then machine TiO 2 and WO 3 The mixed material is pressed into a block, and then the photoresist is coated on the substrate, and the block TiO 2 and WO 3 The mixed material is evaporated as the target material for electron beam evaporation, and a film of about 50nm-200nm is deposited on the substrate coated with photoresist, and then the substrate is soaked in acetone or ethanol solution to peel off the photoresist, and then vacuum dried at room temperature form a sensitive film.

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Abstract

The invention discloses a method for manufacturing a surface acoustic wave transducer sensitive membrane. The method is characterized in that a sensitive membrane is formed on a delay line of a double delay line type oscillator through electron beam evaporation and photoresist stripping, wherein the sensitive membrane is a polymer sensitive membrane consisting of TiO2 and WO3. By utilizing the method provided by the invention, the TiO2 is added to the WO3 to manufacture the polymer sensitive membrane; compared with a pure WO3 transducer sensitive membrane, both the sensitivity and the detection quality of the doped WO3 / TiO2 transducer sensitive membrane are improved to a certain extent, and WO3 is probably used for detecting NO2 gasat normal temperature.

Description

technical field [0001] The invention relates to the technical field of surface acoustic wave (SAW) gas sensor device manufacturing, in particular to a device for detecting NO 2 Gas Surface Acoustic Wave Sensor Sensitivity Membrane Approach. Background technique [0002] The surface acoustic wave gas sensor is a new type of sensor that combines surface acoustic technology with electronic technology. It converts the non-electrical information gas into the frequency change of the surface acoustic wave oscillator, which is directly used for data processing without A / D conversion, and realizes real-time monitoring and intelligence of the sensor. Therefore, it can meet the needs of high-precision and high-quality gas detection. [0003] The basic working principle of the surface acoustic wave gas sensor is that the adsorption of the gas to be treated by the sensitive film covered on the surface of the SAW device causes the change of the conductivity and quality of the SAW sensor...

Claims

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Application Information

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IPC IPC(8): G01N29/036C23C14/28C23C14/08
Inventor 李冬梅汪幸刘明周文侯成诚闫学锋谢常青霍宗亮张满红
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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