Multilayer film reflector based on Pt separation layer and manufacturing method of multilayer film reflector

Abstract

The invention relates to a multilayer film reflector based on a Pt separation layer and a manufacturing method of the multilayer film reflector. The manufacturing method comprises the following steps: plating a Pt separation layer on a high-smoothing glass mother board, then plating an X-ray multilayer film, uniformly spraying liquid epoxy resin, pressing an ultrathin aluminum sheet substrate on the sprayed liquid epoxy resin in a vacuum environment; and after the epoxy resin is solidified at a high temperature, automatically separating the whole set consisting the aluminum sheet substrate, the solidified epoxy resin, the X-ray multilayer film and the Pt separation layer from the glass mother board. As the Pt separation layer which is 3-10 nanometers in thickness is arranged, the method overcomes the detect of the traditional copy process that only an Au or Pt single-layer metal film reflector and a Pt / C periodical film reflector can be prepared due to difficult separation, so that the common X-ray multilayer film material can be used for copying an ultrathin high-smoothing reflector; moreover, the Pt separation layer which is 3-10 nanometers in thickness has low absorption to the hard X ray, and therefore, the addition of the Pt separation layer hardly affects the optical property of the reflector.

Description

technical field [0001] The invention belongs to the field of manufacturing precision optical elements, and in particular relates to a platinum separation layer-based multilayer film reflector and a manufacturing method thereof. Background technique [0002] Hard X-ray astronomical observation is an important means to carry out research on the origin of the universe, the formation of black holes, and the evolution of galaxies. In the past two decades, the United States, Europe, Japan and other countries have been vigorously developing hard X-ray telescope technology. The optical characteristics of X-rays determine that this kind of telescope can only adopt the grazing incidence reflective optical path. In order to increase the light collecting area of ​​the grazing incidence system, the telescope adopts a multi-layer nested structure. Therefore, the optical elements of each nested layer are required to be thin (about 200 microns) and light; at the same time, in order to impr...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a platinum-based separation layer that solves the limitation of film materials caused by separation difficulties in the traditional replication method and improves the performance of ultra-thin and ultra-smooth optical elements in order to overcome the defects in the above-mentioned prior art. Multilayer film reflector and manufacturing method thereof

Images