An optical mirror slip with lanthanide oxide hydrophobic optical thin film and method for preparing the same

A technology of lanthanide oxides and optical lenses, which is applied in optics, optical components, gaseous chemical plating, etc., can solve the problems of few reports on thin film materials, and achieve the effects of good hydrophobicity, excellent optical properties, and wide application

Inactive Publication Date: 2017-12-12
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Research on the hydrophobicity of lanthanide oxide ceramic bulk materials has been reported, but there are few reports on thin film materials, especially when applied to optical thin films.

Method used

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  • An optical mirror slip with lanthanide oxide hydrophobic optical thin film and method for preparing the same
  • An optical mirror slip with lanthanide oxide hydrophobic optical thin film and method for preparing the same
  • An optical mirror slip with lanthanide oxide hydrophobic optical thin film and method for preparing the same

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Embodiment Construction

[0012] In order to make the objects and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, and are not intended to limit the present invention.

[0013] Example: Coating on the light incident side surface of a bandpass filter;

[0014] When preparing by atomic layer deposition coating process and equipment (model Nano9000, Ensure Nanotech), the preparation parameters adopted are: Ce(thmd) 4 The evaporation temperature of the precursor is 110°C, the pulse duration is 1s, and the pulse interval is 1.5s; the pulse duration of ozone is 1.5s, and the pulse interval is 2s; high-purity nitrogen (99.999%) is used as a dilution and buffer gas; The growth temperature of the atomic layer deposition film is 220° C.; the pressure of the reaction chamber is 2-3 mbar.

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Abstract

The invention provides lanthanide oxide hydrophobic optical thin film prepared by using an atomic layer deposition method. A film layer is made of lanthanide oxide, so that when being applied to the surface of a substrate of an optical mirror slip, the film layer does not influence the optical performance of the original mirror slip. The lanthanide oxide hydrophobic optical thin film can be applied to the surfaces of optical devices requiring the hydrophobic property, such as an anti-fog optical transmitting mirror and a reflector. The lanthanide oxide thin film needs to be prepared by using atomic layer deposition coating technology and equipment and has the advantages of good hydrophobic property, excellent optical performance and wide application.

Description

technical field [0001] The invention relates to the field of film coating, in particular to the field of a lanthanide oxide hydrophobic optical film capable of ensuring dual properties of hydrophobicity and light transmission. Background technique [0002] Hydrophobic and superhydrophobic coatings have become a research hotspot in recent years. At the beginning, people used the principle of bionics to imitate the micro-nano structure of the surface of the lotus leaf to prepare a hydrophobic coating. The contact angle of water droplets on the surface can reach 130°-160°, which has hydrophobic or even super-hydrophobic properties. Later, scientists developed some organic hydrophobic coatings with low surface energy, such as polytetrafluoroethylene and so on. However, in some special fields, such as the surface of optical components with hydrophobic requirements, the hydrophobic coating is required to be transparent in the working band, and in special cases, it can be applied ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/18C23C16/40C23C16/455
CPCG02B1/18C23C16/40C23C16/45527C23C16/45555
Inventor 张绍骞邓淞文李刚李庆伟金玉奇
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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