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Light-driven double-shaft optical scanning probe

An optical scanning and optical driving technology, applied in the fields of scanning micromirrors and optical scanning devices, can solve problems such as failure of metal wire bonding process, achieve the effect of improving reliability and safety, and simplifying equipment structure

Inactive Publication Date: 2012-10-03
蚌埠尚维知识产权运营有限公司
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  • Description
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AI Technical Summary

Problems solved by technology

There is a certain risk of failure in the metal wire bonding process

Method used

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  • Light-driven double-shaft optical scanning probe
  • Light-driven double-shaft optical scanning probe
  • Light-driven double-shaft optical scanning probe

Examples

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Embodiment Construction

[0020] Below in conjunction with accompanying drawing and embodiment the present invention will be further described: as figure 1 As shown, it includes a scanning micromirror 1, a micro-optical system 2 and a silicon optical platform 3, wherein the scanning micromirror 1 includes a microdriver 1.1, a planar spring 1.2 and a movable mirror 1.3. The output end of the micro-driver 1.1 is connected with the input end of the planar spring 1.2, and the output end of the planar spring 1.2 is connected with the input end of the movable mirror 1.3; each device includes 1 movable mirror 1.3, 4 planar springs 1.2 and 4 The micro-driver 1.1, the movable mirror 1.3 is connected with 4 planar springs 1.2, and each planar spring 1.2 is connected with 1 micro-driver 1.1; the micro-optical system 2 includes a single-mode optical fiber 2.1, a self-focusing lens 2.2, and 2 optical filters 2.3 and 2 photocells 2.4; the silicon optical platform 3 is used to calibrate and fix the micro-optical syst...

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Abstract

A light-driven double-shaft optical scanning probe comprises a scanning micromirror, a microphotoelectric system and a silica optical platform, wherein the scanning micromirror comprises micro drivers, plane springs and a movable lens; the output ends of the micro drivers are connected with the input ends of the plane springs; the output ends of the plane springs are connected with the input end of the movable lens; each apparatus comprises one movable lens, four plane springs and four micro drivers, wherein the movable lens is connected with the four plane springs, and each plane spring is connected with one micro driver; and the microphotoelectric system comprises a single mode fiber, a self-focusing lens, two optical filters and two photoelectric cells. Incident beams transmitted and focused by the microphotoelectric system are deflected for 90 degrees by the scanning micromirror and then vertically enter an imaging target, and beams reflected by the imaging target are deflected for 90 degrees by the scanning micromirror and then are collected and transmitted to an external optical imaging system by the microphotoelectric system.

Description

technical field [0001] The invention relates to a light-driven biaxial optical scanning probe, in particular adopting a scanning micromirror based on photoelectric conversion technology as an optical scanning device. Background technique [0002] Micro optical scanning devices manufactured by silicon micromachining technology have very important applications in optical scanning, optical imaging, laser projection and other fields. Especially in the field of optical endoscopic imaging, imaging probes integrated with micro-optical scanning devices can scan in various diameters of the human body (such as blood vessels, digestive tracts, etc.), and combine with external optical imaging equipment to obtain Two-dimensional images or three-dimensional images of human tissue. [0003] Usually, micro optical scanning devices use aluminum or gold wire bonding technology to establish a stable and reliable electrical connection between the pad on the surface of the device and the extern...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/00
Inventor 徐英舜
Owner 蚌埠尚维知识产权运营有限公司
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