Large-area-friction-induced micron-scale processing equipment in multipoint contact mode

A multi-point contact and friction-induced technology, which is applied in the process of producing decorative surface effects, microstructure technology, microstructure devices, etc., can solve the problems of slow processing speed, limited processing efficiency, low efficiency, etc. The structure is uniform, the processing efficiency is improved, and the processing cost is low.

Active Publication Date: 2012-10-10
SOUTHWEST JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] At present, friction-induced micro/nanofabrication technology is mainly accomplished by scanning probe microscope, which can only work in single-probe mode, which severely limits its processing efficiency
Moreover, the processing spe

Method used

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  • Large-area-friction-induced micron-scale processing equipment in multipoint contact mode
  • Large-area-friction-induced micron-scale processing equipment in multipoint contact mode
  • Large-area-friction-induced micron-scale processing equipment in multipoint contact mode

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Embodiment

[0036] figure 1 As shown, a specific embodiment of the present invention is a large-area friction-induced micron-scale processing equipment in a multi-point contact mode, which consists of a base 12, a processing platform driving device on the base 12, and a It is composed of loading mechanism and data acquisition and control system, among which:

[0037] The composition of the processing platform driving device is: the horizontal two-dimensional electronically controlled translation platform 1 is fixed on the upper surface of the base 12 by bolts, the bottom plate of the manual three-dimensional displacement platform 3 is fixed on the horizontal two-dimensional electronically controlled translation platform through the connecting plate 2 The upper surface of 1; the vertical plate of the manual three-dimensional translation stage 3 is fixedly connected with the vertical plate of the "L"-shaped sample table 4;

[0038] The composition of described loading mechanism is: electri...

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PUM

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Abstract

The invention relates to large-area-friction-induced micron-scale processing equipment in a multipoint contact mode. The large-area-friction-induced micron-scale processing equipment consists of a base, a processing platform drive device, a loading mechanism and a data acquisition and control system, wherein the processing platform drive device consists of a horizontal two-dimensional electronically-controlled translation stage, a manual three-dimensional displacement stage and an L-shaped sample stage; the loading mechanism is formed in a manner that an electric angular displacement stage is arranged on the upper surface of the base, the fixed end of a force-sensitive cantilever beam is fixed on the horizontal working surface of the electric angular displacement stage, and a probe array is fixed on the lower surface of the end part of the free end of the cantilever beam; a laser displacement sensor is located right above the end part of the free end of the cantilever beam; and the horizontal two-dimensional electronically-controlled translation stage, the electric angular displacement stage and the laser displacement sensor are all electrically connected with the data acquisition and control system. The equipment has the advantages of large processing size, high processing efficiency, accuracy in load control, evenness in load distribution and evenness and consistency for processed structures.

Description

technical field [0001] The invention relates to a micron-level processing device, in particular to a large-area friction-induced micron-level processing device in a multi-point contact mode. Background technique [0002] Nanotechnology has created a new era of human life in the 21st century. Its development will not only promote the revolution of human cognition, but also an important guarantee for the sustainable development of human beings. Based on its broad development prospects and its significance to the country's future economic, social development and national defense security, countries all over the world regard the research and development of nanotechnology as an important driving force for technological innovation, setting off a research boom in nanotechnology worldwide. Nano-manufacturing is the way to realize the transformation of nano-technology from functional principles to manufacturing principles, and it is also the basis for supporting nano-technology to be...

Claims

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Application Information

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IPC IPC(8): B81C1/00
Inventor 钱林茂吴治江余丙军宋晨飞周仲荣
Owner SOUTHWEST JIAOTONG UNIV
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