Large-area-friction-induced micron-scale processing equipment in multipoint contact mode

Abstract

The invention relates to large-area-friction-induced micron-scale processing equipment in a multipoint contact mode. The large-area-friction-induced micron-scale processing equipment consists of a base, a processing platform drive device, a loading mechanism and a data acquisition and control system, wherein the processing platform drive device consists of a horizontal two-dimensional electronically-controlled translation stage, a manual three-dimensional displacement stage and an L-shaped sample stage; the loading mechanism is formed in a manner that an electric angular displacement stage is arranged on the upper surface of the base, the fixed end of a force-sensitive cantilever beam is fixed on the horizontal working surface of the electric angular displacement stage, and a probe array is fixed on the lower surface of the end part of the free end of the cantilever beam; a laser displacement sensor is located right above the end part of the free end of the cantilever beam; and the horizontal two-dimensional electronically-controlled translation stage, the electric angular displacement stage and the laser displacement sensor are all electrically connected with the data acquisition and control system. The equipment has the advantages of large processing size, high processing efficiency, accuracy in load control, evenness in load distribution and evenness and consistency for processed structures.

Description

technical field [0001] The invention relates to a micron-level processing device, in particular to a large-area friction-induced micron-level processing device in a multi-point contact mode. Background technique [0002] Nanotechnology has created a new era of human life in the 21st century. Its development will not only promote the revolution of human cognition, but also an important guarantee for the sustainable development of human beings. Based on its broad development prospects and its significance to the country's future economic, social development and national defense security, countries all over the world regard the research and development of nanotechnology as an important driving force for technological innovation, setting off a research boom in nanotechnology worldwide. Nano-manufacturing is the way to realize the transformation of nano-technology from functional principles to manufacturing principles, and it is also the basis for supporting nano-technology to be...

AI Technical Summary

Problems solved by technology

[0004] At present, friction-induced micro / nanofabrication technology is mainly accomplished by scanning probe microscope, which can only work in single-probe mode, which severely limits its processing efficiency

Moreover, the processing speed is slow, the efficiency is low, and its processing range generally cannot exceed 100 microns, it is difficult to meet the requirements of mass production, which hinders the application of friction-induced micro / nano processing technology

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