Ammonia refining system and ammonia refining method

Abstract

PURPOSE: An ammonia purification system and an ammonia purification method are provided to efficiently purify ammonia with low energy consumption. CONSTITUTION: An ammonia purification system(100) comprises a storage unit(1), a vaporization unit(2), an adsorption unit(3) and a partial condensation unit(5). The storage unit stores tub ammonia in liquid phase and draws the tub ammonia. The vaporization unit vaporizes a part of the tub ammonia in the liquid phase and draws the ammonia in the gas phase. The absorption unit adsorbs and eradicates impurities contained in the ammonia using a porous absorber, and draws the ammonia in the gas phase. The partial condensation unit divides ammonia in the gas phase drawn from the absorption body into the vapor compound and liquid ingredient. [Reference numerals] (2) Vaporization unit; (5) Condenser

Description

technical field [0001] The present invention relates to an ammonia refining system and an ammonia refining method for refining (purifying) crude ammonia. Background technique [0002] In the semiconductor manufacturing process and the liquid crystal manufacturing process, high-purity ammonia is used as a processing agent for the formation of a nitride film and the like. Such high-purity ammonia is obtained by refining crude ammonia to remove impurities. [0003] Crude ammonia contains low boiling point gases such as hydrogen, nitrogen, oxygen, argon, nitric oxide, and carbon dioxide, hydrocarbons, moisture, and the like as impurities. The purity of generally available crude ammonia is about 98 to 99% by weight. [0004] Hydrocarbons contained in crude ammonia are generally mainly those having 1 to 4 carbon atoms. In addition, when producing hydrogen used as a synthetic raw material for ammonia, the separation of oil in the cracked gas is insufficient, or when the producti...

AI Technical Summary

Problems solved by technology

That is, in the techniques for refining ammonia disclosed in JP-A-2006-206410, JP-A-2008-505830, and JP-A-4062710, impurities contained in crude ammonia are adsorbed and distilled. Remove and then condense to obtain refined liquid ammonia. Therefore, as a method for refining ammonia, it cannot be said to be a simplified method. A large amount of energy is required for refining ammonia.

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