Inert gas purification method

Abstract

This inert gas purification method, whereby an inert gas containing hydrogen and carbon monoxide is purified, includes: a first step in which oxygen is added to an inert gas, and hydrogen is converted into water through a reaction that uses a catalyst; and a second step, in which, after the first step, carbon monoxide and water are removed from the inert gas by an adsorbent.

Description

technical field [0001] The present invention relates to an inert gas purification method for reusing an inert gas used for preventing oxidation or nitriding. [0002] this application claims priority based on Japanese Patent Application No. 2011-188788 for which it applied to Japan on August 31, 2011, and uses the content here. Background technique [0003] In a heating furnace for heating ceramics, metal, etc., an inert gas such as nitrogen or argon is used to prevent oxidation and nitriding. At this time, since the amount of inert gas used is very large, it is desirable to reuse the inert gas by refining the used gas. [0004] Patent Document 1 discloses an argon purification method and an argon purification device for purifying inert gas argon. In this method, the oxidation of each reducing gas is carried out by carrying out a three-step catalytic reaction in which oxygen may be added in an argon gas containing reducing gases such as carbon monoxide and hydrogen. [00...

AI Technical Summary

Problems solved by technology

[0007] However, in the argon purification method described in Patent Document 1, since the total amount of carbon monoxide and hydrogen is oxidized with oxygen in the catalyst tower, a large amount of oxygen and catalyst are required, which increases the cost.

[0008] That is, in the argon purification method described in Patent Document 1, there is a problem that the inert gas cannot be purified efficiently.

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