High-sensitive biochemical sensor based on resonance oscillation type micro cantilever beam structure

A technology of biochemical sensors and micro-cantilever beams, which is applied in the fields of MEMS, biomedicine and chemical engineering, can solve the problems of increasing system volume and cost, and achieve the effects of eliminating changes in elastic constants, improving detection limits, and high sensitivity

Active Publication Date: 2014-04-09
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

Although the commonly used optical detection has the advantage of high sensitivity, the optical components will increase the size and cost of the system

Method used

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  • High-sensitive biochemical sensor based on resonance oscillation type micro cantilever beam structure
  • High-sensitive biochemical sensor based on resonance oscillation type micro cantilever beam structure
  • High-sensitive biochemical sensor based on resonance oscillation type micro cantilever beam structure

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Embodiment Construction

[0039] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0040] The invention provides a high-sensitivity biochemical sensor based on a resonant micro-cantilever structure, which can measure biochemical molecules with high sensitivity and high precision by adopting a micro-cantilever structure with a micro-column structure 3, a liquid storage tank 4 and a liquid leakage hole 5 at the front end.

[0041] Such as figure 1 as shown, figure 1 is a structural schematic diagram of a highly sensitive biochemical sensor based on a resonant micro-cantilever structure according to an embodiment of the present invention, figure 2 for figure 1 sectional view. The single cantilever beam sensing device includes a resonant cavity, a cantilever beam and a Whist bridge detection circuit. W...

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Abstract

The invention discloses a high sensitive biochemical sensor based on a resonance oscillation type micro cantilever beam structure. The biochemical sensor comprises a resonance oscillation chamber, a cantilever beam and a Whist bridge type detection circuit, wherein a micro column structure (3), a liquid storage tank (4) and a liquid leakage hole (5) through which biochemical solution flows are etched at the free end of the cantilever beam; the support end of the cantilever beam is connected with the Whist bridge type detection circuit; the Whist bridge type detection circuit is composed four U-shaped piezoresistance bars (1), three input electrodes (8, 9, 10) and two output electrodes (7, 11); and the four piezoresistance bars (1) are connected with the input electrodes (8, 9, 10) and the output electrodes (7, 11) through a signal transmission line (2). With the adoption of the biochemical sensor, micro biochemical molecules can be sensed with a high sensitivity by detecting the frequency change after an object to be tested is absorbed; biochemical molecules with micromass can be detected; and the biochemical sensor can be widely used in engineering fields such as medicine and chemistry.

Description

technical field [0001] The invention relates to the fields of MEMS, biomedicine and chemical engineering, in particular to a highly sensitive biochemical sensor based on a resonant micro-cantilever beam structure. Background technique [0002] Since the 1970s, resonant sensors have developed rapidly on the basis of electronic technology, testing technology, computing technology and semiconductor integrated circuit technology. 【1】 . With the rapid development of MEMS technology, the size of resonant sensors has been reduced to micron, submicron or even nanometer level, which can perform high-precision measurement of various physical quantities such as temperature, thermal energy, magnetic field and mass, so it is widely used in chemical analysis. , biological testing, pharmaceutical screening and environmental monitoring and other fields. [0003] In recent years, research on high-sensitivity biochemical detection based on the micro-cantilever structure has become a researc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N5/02
Inventor 杨晋玲王帅鹏王晶晶杨富华
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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