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Distributed feedback laser and preparation method thereof

A distributed feedback, laser technology, used in lasers, laser parts, semiconductor lasers, etc., can solve the problems of poor device performance stability and reliability, difficult epitaxial material growth, and low yield, etc. Cost, reduce optical power density, improve yield effect

Inactive Publication Date: 2012-10-17
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] It can be seen that since the Bragg grating is to be fabricated after the epitaxial growth to the upper waveguide layer, the second epitaxy must be used, which requires extremely strict requirements on the process, the growth of epitaxial materials is difficult, the yield is very low, and the stability and reliability of device performance very poor

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  • Distributed feedback laser and preparation method thereof
  • Distributed feedback laser and preparation method thereof
  • Distributed feedback laser and preparation method thereof

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Embodiment Construction

[0018] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0019] It should be noted that, in the drawings or descriptions of the specification, similar or identical parts all use the same figure numbers. And in the accompanying drawings, it is marked for simplicity or convenience. Furthermore, implementations not shown or described in the accompanying drawings are forms known to those of ordinary skill in the art. Additionally, while illustrations of parameters including particular values ​​may be provided herein, it should be understood that the parameters need not be exactly equal to the corresponding values, but rather may approximate the corresponding values ​​within acceptable error margins or design constraints.

[0020] In an exemplary embodiment of the present invention...

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Abstract

The invention provides a distributed feedback laser and a preparation method thereof. The distributed feedback laser comprises the following layers deposited on a substrate from bottom to top: a lower limit layer, a lower waveguide layer, an active region, an upper waveguide layer, an upper limit layer and an ohmic contact layer; the two sides of the middle part of the distributed feedback laser are etched with grooves, and the bottoms of the grooves are formed in any positions between the ohmic contact layer and the active region; and a ridge type waveguide structure is formed between the two grooves in the middle of the distributed feedback laser, and two side faces of the ridge type waveguide structure are provided with distributed feedback gratings. When the distributed feedback laser is used, the times of extension can be reduced, and errors caused by multiple extensions can be avoided.

Description

technical field [0001] The invention relates to the technical field of lasers in the optical industry, in particular to a distributed feedback laser and a preparation method thereof. Background technique [0002] Erbium-doped fiber superfluorescent light source (ED-SFS) has become the preferred light source for high-precision fiber optic gyroscopes due to its excellent performance. As the core component of ED-SFS, the pump laser has naturally become a research hotspot. Among them, the 980nm pump source has attracted widespread attention due to its high pump efficiency. The traditional 980nm laser adopts FP (Fabry-Perot) cavity-ridge waveguide structure, the output is extremely unstable in the whole temperature range, the wavelength variation exceeds 20nm, and the side mode suppression ratio is also very low. [0003] In terms of improving the side mode suppression ratio, the most commonly used structure at home and abroad is the Distributed Feedback (DFB) structure. figure...

Claims

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Application Information

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IPC IPC(8): H01S5/12H01S5/125
Inventor 郭文涛谭满清
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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