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Energy-saving spotlight heat dissipation lamp box for lithography mask substrate surface detection

The application relates to the technical field of heat dissipation lamp boxes, and discloses an energy-saving spotlight heat dissipation lamp box for detecting the surface of a photoetching mask substrate, which comprises a support, the top of the side wall of the support is fixedly provided with a lamp box, the end of the side wall of the lamp box is fixedly provided with a connecting line, the end, away from the lamp box, of the connecting line is fixedly provided with a control box, the inner wall of the lamp box is fixedly provided with an inspection lamp, heat is generated, the impeller is started, suction is generated through rotation of the impeller, the air pushing plate is moved while the impeller rotates, the rotating plate cannot rotate due to resistance of the upper and lower sealing plates when the air pushing plate is pushed out, a pushing force is generated on the hot flow, the lamp box inner wall heat washing is alternately contacted, the hot flow is discharged under the pushing of the air pushing plate, the heat dissipation efficiency of the lamp box is improved, the light output is stable, and the detection accuracy is improved.
Owner:EXCELL PHOTOELECTRIC CO LTD