Device and method for installing and detaching large mirror for ion beam polisher for large-caliber optical parts

A technology for optical parts and a loading and unloading device is applied in the field of ion beam polishing, and can solve the problems of poor operability and conveying efficiency of ion beam polishing machine, inability to guarantee the machining accuracy of internal rolling guides, and difficulty in ensuring the docking accuracy of internal and external rolling guides, etc. To achieve the effect of improving operability and convenience, convenient separation and connection, and simple structure
CN102744653BActive Publication Date: 2014-11-05NAT UNIV OF DEFENSE TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NAT UNIV OF DEFENSE TECH
Publication Date
2014-11-05

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Abstract

The invention discloses a device for installing and detaching a large mirror for an ion beam polisher for large-caliber optical parts. The device comprises a bearing device, a turning device for transporting measured workpieces and enabling workpiece faces to be machined to be kept downward in the transportation process and a conveying device for carrying the workpieces transported by the turning device and conveying the workpieces to an ion beam polishing vacuum chamber of the polisher. The bearing device comprises a guide trail and an inner frame arranged in the ion beam polishing vacuum chamber and used for carrying the workpieces conveyed by the conveying device. The conveying device is arranged on the guide rail and moves along the guide rail. The device is simple in structure, convenient to operate and control and capable of guaranteeing cleanness of working environment of the ion beam polisher, improves machining precision and machining efficiency of the ion beam polisher, and prolongs the service life of the device. The invention further discloses a method for installing and detaching the large mirror for the ion beam polisher for the large-caliber optical parts.
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Description

technical field

[0001] The invention relates to ion beam polishing technology, in particular to a large mirror loading and unloading device and method for an ion beam polishing machine for large-diameter optical parts. Background technique

[0002] The ion beam polishing method is a unique and effective processing method in optical mirror processing. Since the physical mechanism of material removal by ion beam polishing is the atomic sputtering effect, the amount of material removal during ion beam polishing can be controlled to the atomic level, and the polishing precision is very high; because the removal function in ion beam polishing is stable and not easy to change, Therefore, ion beam polishing has high certainty and fast surface shape convergence; because ion beam polishing is a non-contact polishing method, there is no contact stress and strain, and the removal function does not change when processing the edge of the workpiece, and there is no edge effect.

[0003] ...

Claims

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