Silicon ingot slicing quality monitoring system and monitoring method
A quality monitoring and slicing technology, used in radiation pyrometry, measuring devices, optical radiation measurement, etc. control and other issues, to achieve the effect of improving the quality and efficiency of silicon wafers, reducing line marks, and high slicing quality
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[0015] The present invention will now be further described in conjunction with the accompanying drawings and preferred embodiments. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the configurations related to the present invention.
[0016] Such as figure 1 , figure 2 The silicon ingot slicing quality monitoring system shown includes a slicing device, a detection device for detecting the temperature at the cutting point of the crystal ingot, and a control device with a central processing unit.
[0017] The slicing device includes the inner wall plate 1 of the slicer. One side of the inner wall plate 1 has the crystal bar 2 to be cut, the crystal holder 3 sticking the crystal bar 2, a pair of guide wheels 4 located below the crystal bar 2 and the The steel wire mesh 5 used for grinding the ingot 2 between 4; the detection device includes the infrared sensor 6 lo...
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